发明授权
- 专利标题: Germanium phototransistor with floating body
- 专利标题(中): 具有浮体的锗光电晶体管
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申请号: US11891574申请日: 2007-08-10
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公开(公告)号: US07675056B2公开(公告)日: 2010-03-09
- 发明人: Jong-Jan Lee , Sheng Teng Hsu , Jer-Shen Maa , Douglas J. Tweet
- 申请人: Jong-Jan Lee , Sheng Teng Hsu , Jer-Shen Maa , Douglas J. Tweet
- 申请人地址: US WA Camas
- 专利权人: Sharp Laboratories of America, Inc.
- 当前专利权人: Sharp Laboratories of America, Inc.
- 当前专利权人地址: US WA Camas
- 代理机构: Law Offices of Gerald Maliszewski
- 代理商 Gerald Maliszewski
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L31/072 ; H01L31/109 ; H01L31/0328 ; H01L31/062 ; H01L31/113 ; H01L31/0232
摘要:
A floating body germanium (Ge) phototransistor and associated fabrication process are presented. The method includes: providing a silicon (Si) substrate; selectively forming an insulator layer overlying the Si substrate; forming an epitaxial Ge layer overlying the insulator layer using a liquid phase epitaxy (LPE) process; forming a channel region in the Ge layer; forming a gate dielectric, gate electrode, and gate spacers overlying the channel region; and, forming source/drain regions in the Ge layer. The LPE process involves encapsulating the Ge with materials having a melting temperature greater than a first temperature, and melting the Ge using a temperature lower than the first temperature. The LPE process includes: forming a dielectric layer overlying deposited Ge; melting the Ge; and, in response to cooling the Ge, laterally propagating an epitaxial growth front into the Ge from an underlying Si substrate surface.
公开/授权文献
- US20070295953A1 Germanium phototransistor with floating body 公开/授权日:2007-12-27
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