Invention Grant
US07675175B2 Semiconductor device having isolated pockets of insulation in conductive seal ring
有权
半导体器件在导电密封环中具有隔离的绝缘袋
- Patent Title: Semiconductor device having isolated pockets of insulation in conductive seal ring
- Patent Title (中): 半导体器件在导电密封环中具有隔离的绝缘袋
-
Application No.: US11150107Application Date: 2005-06-13
-
Publication No.: US07675175B2Publication Date: 2010-03-09
- Inventor: Shunichi Tokitoh , Seiichi Kondou , Bo Un Yoon
- Applicant: Shunichi Tokitoh , Seiichi Kondou , Bo Un Yoon
- Applicant Address: JP Tokyo
- Assignee: Oki Semiconductor Co., Ltd.
- Current Assignee: Oki Semiconductor Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Volentine & Whitt, P.L.L.C.
- Priority: JP2004-177259 20040615
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
A semiconductor device with a damascene wiring structure which can prevent short-circuits between a seal ring and a wiring line or electrode pad. An upper layer barrier layer made from a conductive barrier material film is formed on an interlayer insulating film groove sidewall of the semiconductor device. Embedded in the groove is an upper layer seal ring wiring line with thickness of approximately 10 micrometers for instance, in which a plurality of isolated pockets of insulators are disbursed. These isolated pockets of insulators are formed using the interlayer insulating film which forms the damascene wiring line. Additionally, a first upper layer groove wiring line and a second upper layer groove wiring line are formed in an element forming region, and an upper layer barrier layer is formed on the outside perimeter. The upper layer seal ring wiring line and both upper layer wiring lines all have damascene wiring structures.
Public/Granted literature
- US20060001165A1 Semiconductor device Public/Granted day:2006-01-05
Information query
IPC分类: