Invention Grant
- Patent Title: Thin film piezoelectric actuator
- Patent Title (中): 薄膜压电致动器
-
Application No.: US11781667Application Date: 2007-07-23
-
Publication No.: US07675222B2Publication Date: 2010-03-09
- Inventor: Takashi Kawakubo , Ryoichi Ohara , Tomio Ono , Toshihiko Nagano , Michihiko Nishigaki , Takaaki Yasumoto , Kazuhide Abe , Kenya Sano
- Applicant: Takashi Kawakubo , Ryoichi Ohara , Tomio Ono , Toshihiko Nagano , Michihiko Nishigaki , Takaaki Yasumoto , Kazuhide Abe , Kenya Sano
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- Priority: JP2004-034984 20040212; JP2005-003370 20050111
- Main IPC: H01L41/08
- IPC: H01L41/08

Abstract:
A thin film piezoelectric actuator comprises a driving part at least one end of which is supported by an anchor portion. The driving part includes: a piezoelectric film, a first lower electrode provided under a first region of the piezoelectric film, a second lower electrode provided under a second region different from the first region of the piezoelectric film, a first upper electrode provided opposite to the first lower electrode on the piezoelectric film, a second upper electrode provided opposite to the second lower electrode on the piezoelectric film, a first connection part that electrically connects the first lower electrode and the second upper electrode via a first via hole formed in the piezoelectric film, and a second connection part that electrically connects the second lower electrode and the first upper electrode via a second via hole formed in the piezoelectric film.
Public/Granted literature
- US20070278900A1 THIN FILM PIEZOELECTRIC ACTUATOR Public/Granted day:2007-12-06
Information query
IPC分类: