发明授权
- 专利标题： Vertical heat treatment system and method of transferring process objects
- 专利标题（中）： 立式热处理系统及其处理方法
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申请号： US10593973申请日： 2005-03-25
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公开(公告)号： US07677858B2公开(公告)日： 2010-03-16
- 发明人: Satoshi Asari , Katsuhiko Mihara , Hiroshi Kikuchi
- 申请人： Satoshi Asari , Katsuhiko Mihara , Hiroshi Kikuchi
- 申请人地址： JP Tokyo
- 专利权人： Tokyo Electron Limited
- 当前专利权人： Tokyo Electron Limited
- 当前专利权人地址： JP Tokyo
- 代理机构： Smith, Gambrell & Russell, LLP
- 优先权： JP2004-089515 20040325; JP2005-055271 20050301
- 国际申请： PCT/JP2005/005518 WO 20050325
- 国际公布： WO2005/093354 WO 20051006
- 主分类号： B66C17/08
- IPC分类号： B66C17/08
摘要：
Disclosed is an improved transfer mechanism that transfers, in a vertical heat treatment system, process objects W between a container (carrier), and a holder (boat) holding plural process objects at vertical intervals. The transfer mechanism includes plural substrate support devices spaced at intervals, and each of the substrate support devices has a gripping mechanism for gripping a process object on the under side. The gripping mechanism includes a fixed engagement member on a distal end of the substrate support device, and a movable engagement member movably attached to a proximal end of the substrate support device.
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