发明授权
US07678858B2 Fluorine-containing elastomer composition excellent in plasma-aging prevention effect and shaped article made thereof
有权
等离子体防老化效果优异的含氟弹性体组合物及其制成的成型制品
- 专利标题： Fluorine-containing elastomer composition excellent in plasma-aging prevention effect and shaped article made thereof
- 专利标题（中）： 等离子体防老化效果优异的含氟弹性体组合物及其制成的成型制品
-
申请号： US10553976申请日： 2004-04-21
-
公开(公告)号： US07678858B2公开(公告)日： 2010-03-16
- 发明人: Hiroyuki Tanaka , Kouji Fukuyama , Tsuyoshi Noguchi
- 申请人： Hiroyuki Tanaka , Kouji Fukuyama , Tsuyoshi Noguchi
- 申请人地址： JP Osaka
- 专利权人： Daikin Industries, Ltd.
- 当前专利权人： Daikin Industries, Ltd.
- 当前专利权人地址： JP Osaka
- 代理机构： Sughrue Mion, PLLC
- 优先权： JP2003-117520 20030422; JP2003-381323 20031111
- 国际申请： PCT/JP2004/005688 WO 20040421
- 国际公布： WO2004/094527 WO 20041104
- 主分类号： C08L27/12
- IPC分类号： C08L27/12
摘要：
The present invention provides a fluorine containing elastomer composition which does not affect heat resistance and processability, is little in weight change for both of fluorine plasma and oxygen plasma exposed at the production step of a semiconductor and can inhibit generation of foreign objects (particles) significantly in those steps, and a molded article comprising the composition. The present invention relates to a fluorine containing elastomer composition for the seal material of a semiconductor production device comprising a fluorine containing elastomer and a compound having plasma antiaging effects.
公开/授权文献
信息查询
