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1.发明申请Fluorine-containing elastomer composition excellent in plasma-aging prevention effect and shaped article made thereof 有权等离子体防老化效果优异的含氟弹性体组合物及其制成的成型制品公开(公告)号：US20060235140A1
公开(公告)日：2006-10-19
申请号：US10553976
申请日：2004-04-21
IPC分类号： C08L27/12
CPC分类号： C09K3/1009 , C08K5/0041 , C08L27/12
摘要： The present invention provides a fluorine containing elastomer composition which does not affect heat resistance and processability, is little in weight change for both of fluorine plasma and oxygen plasma exposed at the production step of a semiconductor and can inhibit generation of foreign objects (particles) significantly in those steps, and a molded article comprising the composition. The present invention relates to a fluorine containing elastomer composition for the seal material of a semiconductor production device comprising a fluorine containing elastomer and a compound having plasma antiaging effects.
摘要翻译： 本发明提供一种不影响耐热性和加工性的含氟弹性体组合物，在半导体生产步骤中暴露的氟等离子体和氧等离子体的重量变化很小，并且可以显着地抑制异物（颗粒）的产生 在这些步骤中，以及包含该组合物的模塑制品。 本发明涉及包含含氟弹性体和具有等离子体抗老化效果的化合物的半导体制造装置的密封材料用含氟弹性体组合物。
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2.发明授权Fluorine-containing elastomer composition excellent in plasma-aging prevention effect and shaped article made thereof 有权等离子体防老化效果优异的含氟弹性体组合物及其制成的成型制品公开(公告)号：US07678858B2
公开(公告)日：2010-03-16
申请号：US10553976
申请日：2004-04-21
IPC分类号： C08L27/12
CPC分类号： C09K3/1009 , C08K5/0041 , C08L27/12
摘要： The present invention provides a fluorine containing elastomer composition which does not affect heat resistance and processability, is little in weight change for both of fluorine plasma and oxygen plasma exposed at the production step of a semiconductor and can inhibit generation of foreign objects (particles) significantly in those steps, and a molded article comprising the composition. The present invention relates to a fluorine containing elastomer composition for the seal material of a semiconductor production device comprising a fluorine containing elastomer and a compound having plasma antiaging effects.
摘要翻译： 本发明提供一种不影响耐热性和加工性的含氟弹性体组合物，在半导体生产步骤中暴露的氟等离子体和氧等离子体的重量变化很小，并且可以显着地抑制异物（颗粒）的产生 在这些步骤中，以及包含该组合物的模塑制品。 本发明涉及包含含氟弹性体和具有等离子体抗老化效果的化合物的半导体制造装置的密封材料用含氟弹性体组合物。
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公开(公告)号：US20070037922A1
公开(公告)日：2007-02-15
申请号：US10572779
申请日：2004-09-21
申请人： Hiroyuki Tanaka , Tsuyoshi Noguchi
发明人： Hiroyuki Tanaka , Tsuyoshi Noguchi
IPC分类号： C08L27/12
CPC分类号： C09K3/1009 , F16J15/102 , Y10T428/24355
摘要： The present invention provides a perfluoroelastomer seal material in which adhesive strength, contamination, corrosion and color change of a contacted surface with a seal material are improved, and an amount of an uncrosslinked polymer component is at most 1% by weight, measured under specific conditions, and a process for preparing the same. The present invention relates to a perfluoroelastomer seal material, wherein a rate of weight decrease is at most 1% by weight when the seal material is immersed into perfluoro(tri-n-butyl)amine at 60° C. for 70 hours and is dried at 90° C. for 5 hours, 125° C. for 5 hours and 200° C. for 10 hours after taken out of the emersion. And, the present invention also relates to a process for preparing a perfluoroelastomer seal material comprising a step of treating with a solvent having at least 50 % of a swelling rate based on said molded article, when said molded article is immersed at 60° C. for 70 hours.
摘要翻译： 本发明提供了一种全氟弹性体密封材料，其中改善了与密封材料的接触表面的粘合强度，污染物，腐蚀和颜色变化，并且在特定条件下测量的未交联聚合物组分的量为至多1重量％ ，及其制备方法。 全氟弹性体密封材料技术领域本发明涉及一种全氟弹性体密封材料，其中当密封材料在60℃下浸入全氟（三正丁基）胺中70小时时，其重量减少率至多为1重量％，并干燥 在90℃，5小时，125℃，5小时和200℃，10分钟后脱出。 另外，本发明还涉及一种全氟弹性体密封材料的制造方法，其特征在于，在将所述成形体浸渍于60℃时，使用具有基于所述成型体的至少50％的溶胀率的溶剂进行处理的工序。 70个小时。
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公开(公告)号：US06946513B2
公开(公告)日：2005-09-20
申请号：US10275685
申请日：2001-04-27
CPC分类号： C08F214/18 , H01L23/293 , H01L2924/0002 , H01L2924/12044 , H01L2924/00
摘要： There is provided an elastomer composition which is prepared by using a very clean filler reduced in both of an amount of moisture generation and an amount of organic outgas generation and is suitable as a molding material for semiconductor production apparatuses and there is provided a molded article. The composition is a crosslinkable composition comprising a high molecular weight polymer, particularly a crosslinkable fluorine-containing elastomer and a filler which has a weight reduction ratio per unit surface area of not more than 2.5×10−5% by weight/m2 when heating at 200° C. for two hours and a total amount of organic gas generated of not more than 2.5 ppm when heating at 200° C. for 15 minutes. The molded article is produced from the crosslinkable composition.
摘要翻译： 提供一种弹性体组合物，其通过使用在水分产生量和有机废气产生量中减少的非常干净的填料制备，并且适合作为半导体制造装置的成型材料，并且提供了模制品。 该组合物是包含高分子量聚合物，特别是可交联的含氟弹性体和填料的交联组合物，其每单位表面积的重量减少率不超过2.5×10 -5％ 在200℃下加热2小时，并且在200℃下加热15分钟时产生的有机气体总量不超过2.5ppm的总重量/ m 2。 模制品由可交联组合物制备。
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5.发明申请公开(公告)号：US20050090598A1
公开(公告)日：2005-04-28
申请号：US10995107
申请日：2004-11-24
CPC分类号： H01L23/293 , C08K3/36 , H01L2924/0002 , C08L27/12 , H01L2924/00
摘要： To provide a very clean elastomer molded article excellent in plasma resistance, having excellent property of metal-elution inhibition and is used suitably as a material for molded article for a semiconductor or liquid crystal manufacturing equipment. The molded article is obtained by crosslinking a crosslinkable elastomer composition comprising an elastomer component and a metal oxide filler comprising a silicon oxide filler containing impurity metals other than silicon in an amount of not more than 100 ppm. The molded article has an impurity metal content of not more than 100 ppm, and an increasing rate of particles generated by irradiating oxygen plasma to the article is not more than 1,000% or an amount of impurity metals other than silicon which is extracted with a 50% aqueous solution of HF is not more than 200 ppb.
摘要翻译： 为了提供耐溶剂性优异的非常干净的弹性体成型体，具有优异的金属洗脱性能，适用于半导体或液晶制造装置的成型品的材料。 模制品通过使包含弹性体组分的交联性弹性体组合物和包含不超过100ppm的含硅杂质金属的氧化硅填料的金属氧化物填料交联而获得。 模制品的杂质金属含量不大于100ppm，通过向制品照射氧等离子体而产生的颗粒的增加速率不超过1000％，或者以50被提取的除了硅以外的杂质金属的量 HF的％水溶液不超过200ppb。
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6.发明授权Crosslinkable elastromer composition, sealing material produced from the composition, and filler for use therein 有权可交联的弹性体组合物，由组合物制备的密封材料，以及用于其中的填料公开(公告)号：US06683127B1
公开(公告)日：2004-01-27
申请号：US09743709
申请日：2001-01-16
IPC分类号： C08L304
摘要： A carbon black filler for crosslinkable elastomer composition having a content of impurity metals of not more than 300 ppm and a pH value of 5.0 to 11.0. The filler can be obtained by subjecting a starting carbon black filler to extraction treatment with an acid to reduce a content of impurity metals of the filler and then alkali treatment with an alkali to neutralize a remaining acid. The filler does not cause a crosslinking failure even when added to an elastomer composition and can provide an elastomer molded article suitable as a very clean sealing material for semi-conductor production apparatuses.
摘要翻译： 1.一种用于交联性弹性体组合物的炭黑填料，其杂质金属含量不超过300ppm，pH值为5.0〜11.0。 填充剂可以通过使起始炭黑填料用酸进行萃取处理来降低填料的杂质金属含量，然后用碱进行碱处理以中和残留的酸。 填充剂即使添加到弹性体组合物中也不会引起交联失败，并且可以提供适合作为用于半导体生产设备的非常干净的密封材料的弹性体模塑制品。
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公开(公告)号：US06515064B1
公开(公告)日：2003-02-04
申请号：US09889009
申请日：2001-07-06
IPC分类号： C08K304
CPC分类号： C08J5/00 , C08J2321/00 , C08K3/04 , C08L21/00
摘要： To provide an elastomer molded article for a semiconductor manufacturing equipment which not only has cleanliness required but also has an excellent plasma resistance and an excellent property of metal-elution inhibition. The elastomer molded article is obtained by crosslinking a crosslinkable elastomer composition comprising a crosslinkable elastomer component and a carbon black filler having an average particle size of not more than 700 &mgr;m and an impurity metal content measured by an ashing analysis method of not more than 300 ppm and has an impurity metal content measured by an ashing analysis method of not more than 100 ppm. An increasing rate of particles generated by irradiating oxygen plasma to the article is not more than 500% or an amount of impurity metals extracted from the article with a 50% aqueous solution of HF is not more than 500 ppb.
摘要翻译： 为了提供一种用于半导体制造设备的弹性体模塑制品，其不仅需要清洁度，而且具有优异的等离子体电阻和优异的金属洗脱抑制性能。 弹性体成型体是将包含交联性弹性体成分和平均粒径为700μm以下的炭黑填料的交联性弹性体组合物和通过灰化分析法测定的杂质金属含量为300ppm以下， 并且通过灰化分析方法测定的不大于100ppm的杂质金属含量。 通过向制品照射氧等离子体而产生的颗粒的增加率不大于500％，或者用50％的HF水溶液从制品中提取的杂质金属的量不超过500ppb。
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公开(公告)号：US06503986B1
公开(公告)日：2003-01-07
申请号：US09743708
申请日：2001-01-16
IPC分类号： C08L2712
CPC分类号： C09K3/1009 , C08F293/005 , C08L27/12 , C08L27/16 , C08L27/18 , C08L53/00 , C08L2666/24 , C08L2666/02 , C08L2666/04
摘要： To provide a fluorine-containing rubber composition comprising (a-1) a non-perfluoro fluorine-containing rubber and (b-1) a fluorine-containing multi-segment polymer comprising an elastomeric fluorine-containing polymer chain segment and non-elastomeric fluorine-containing polymer chain segment, in which structural units of each of the elastomeric fluorine-containing polymer chain segment and the non-elastomeric fluorine-containing polymer chain segment comprise not less than 90% by mole of a perhalo olefin unit. The fluorine-containing rubber composition is capable of providing a clean sealing material for semi-conductor production apparatuses without using a filler.
摘要翻译： 为了提供含有（a-1）非全氟含氟橡胶的氟橡胶组合物和（b-1）含有弹性体含氟聚合物链段和非弹性体氟的含氟多段聚合物 聚合物链段，其中弹性体含氟聚合物链段和非弹性含氟聚合物链段的结构单元包括不少于90摩尔％的全卤代烯烃单元。 含氟橡胶组合物能够在不使用填料的情况下为半导体制造装置提供清洁的密封材料。
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公开(公告)号：US07834096B2
公开(公告)日：2010-11-16
申请号：US10572779
申请日：2004-09-21
申请人： Hiroyuki Tanaka , Tsuyoshi Noguchi
发明人： Hiroyuki Tanaka , Tsuyoshi Noguchi
IPC分类号： C08L27/12
CPC分类号： C09K3/1009 , F16J15/102 , Y10T428/24355
摘要： The present invention provides a perfluoroelastomer seal material in which adhesive strength, contamination, corrosion and color change of a contacted surface with a seal material are improved, and an amount of an uncrosslinked polymer component is at most 1% by weight, measured under specific conditions, and a process for preparing the same. The present invention relates to a perfluoroelastomer seal material, wherein a rate of weight decrease is at most 1% by weight when the seal material is immersed into perfluoro(tri-n-butyl)amine at 60° C. for 70 hours and is dried at 90° C. for 5 hours, 125° C. for 5 hours and 200° C. for 10 hours after taken out of the emersion. And, the present invention also relates to a process for preparing a perfluoroelastomer seal material comprising a step of treating with a solvent having at least 50 % of a swelling rate based on said molded article, when said molded article is immersed at 60° C. for 70 hours.
摘要翻译： 本发明提供了一种全氟弹性体密封材料，其中改善了与密封材料的接触表面的粘合强度，污染物，腐蚀和颜色变化，并且在特定条件下测量的未交联聚合物组分的量为至多1重量％ ，及其制备方法。 全氟弹性体密封材料技术领域本发明涉及一种全氟弹性体密封材料，其中当密封材料在60℃下浸入全氟（三正丁基）胺中70小时时，其重量减少率至多为1重量％，并干燥 在90℃，5小时，125℃，5小时和200℃，10分钟后脱出。 另外，本发明还涉及一种全氟弹性体密封材料的制造方法，其特征在于，在将所述成形体浸渍于60℃时，使用具有基于所述成型体的至少50％的溶胀率的溶剂进行处理的工序。 70个小时。
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公开(公告)号：US20090076197A1
公开(公告)日：2009-03-19
申请号：US12264089
申请日：2008-11-03
申请人： Hirofumi Nishibayashi , Takafumi Yamato , Katsuhiko Higashino , Hiroyuki Tanaka , Tsuyoshi Noguchi
发明人： Hirofumi Nishibayashi , Takafumi Yamato , Katsuhiko Higashino , Hiroyuki Tanaka , Tsuyoshi Noguchi
IPC分类号： C08K3/00
CPC分类号： C08L27/18 , C08G73/101 , C08L79/08 , C08L101/00 , C08L2666/14 , C08L2666/02
摘要： The present invention provides a crosslinkable elastomer composition, in which generation of HF under high temperature conditions is reduced, the decrease in weight to both NF3 plasma treatment and O3 treatment in the semiconductor manufacturing process is small and generation of foreign substances (particles) in these treatments is suppressed significantly. Specifically, the present invention relates to a crosslinkable elastomer composition comprising a crosslinkable elastomer and a filler having a specific surface area of at least 0.5 m2/g and containing a synthetic polymer having a thermally and chemically stable aromatic ring in the main chain, a crosslinkable elastomer composition comprising a crosslinkable elastomer and nonoxide ceramics and a crosslinkable elastomer composition wherein the decrease in weight by NF3 plasma irradiation is at most 0.20%.
摘要翻译： 本发明提供了一种可交联弹性体组合物，其中在高温条件下产生HF，在半导体制造过程中，NF3等离子体处理和O 3处理两者的重量减少很小，并且在这些中产生异物（颗粒） 治疗显着抑制。 具体地说，本发明涉及可交联弹性体组合物，其包含可交联弹性体和比表面积至少为0.5m 2 / g的填料，并且含有在主链中具有热和化学稳定的芳环的合成聚合物，可交联的 包含可交联弹性体和非氧化物陶瓷的弹性体组合物和可交联弹性体组合物，其中NF 3等离子体照射的重量减少至多0.20％。
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