公开(公告)号：US07678858B2

公开(公告)日：2010-03-16

申请号：US10553976

申请日：2004-04-21

申请人： Hiroyuki Tanaka ,  Kouji Fukuyama ,  Tsuyoshi Noguchi

发明人： Hiroyuki Tanaka ,  Kouji Fukuyama ,  Tsuyoshi Noguchi

IPC分类号： C08L27/12

CPC分类号： C09K3/1009 ,  C08K5/0041 ,  C08L27/12

摘要： The present invention provides a fluorine containing elastomer composition which does not affect heat resistance and processability, is little in weight change for both of fluorine plasma and oxygen plasma exposed at the production step of a semiconductor and can inhibit generation of foreign objects (particles) significantly in those steps, and a molded article comprising the composition. The present invention relates to a fluorine containing elastomer composition for the seal material of a semiconductor production device comprising a fluorine containing elastomer and a compound having plasma antiaging effects.

摘要翻译： 本发明提供一种不影响耐热性和加工性的含氟弹性体组合物，在半导体生产步骤中暴露的氟等离子体和氧等离子体的重量变化很小，并且可以显着地抑制异物（颗粒）的产生 在这些步骤中，以及包含该组合物的模塑制品。 本发明涉及包含含氟弹性体和具有等离子体抗老化效果的化合物的半导体制造装置的密封材料用含氟弹性体组合物。

公开(公告)号：US20060235140A1

公开(公告)日：2006-10-19

申请号：US10553976

申请日：2004-04-21

申请人： Hiroyuki Tanaka ,  Kouji Fukuyama ,  Tsuyoshi Noguchi

发明人： Hiroyuki Tanaka ,  Kouji Fukuyama ,  Tsuyoshi Noguchi

IPC分类号： C08L27/12

CPC分类号： C09K3/1009 ,  C08K5/0041 ,  C08L27/12

摘要： The present invention provides a fluorine containing elastomer composition which does not affect heat resistance and processability, is little in weight change for both of fluorine plasma and oxygen plasma exposed at the production step of a semiconductor and can inhibit generation of foreign objects (particles) significantly in those steps, and a molded article comprising the composition. The present invention relates to a fluorine containing elastomer composition for the seal material of a semiconductor production device comprising a fluorine containing elastomer and a compound having plasma antiaging effects.

摘要翻译： 本发明提供一种不影响耐热性和加工性的含氟弹性体组合物，在半导体生产步骤中暴露的氟等离子体和氧等离子体的重量变化很小，并且可以显着地抑制异物（颗粒）的产生 在这些步骤中，以及包含该组合物的模塑制品。 本发明涉及包含含氟弹性体和具有等离子体抗老化效果的化合物的半导体制造装置的密封材料用含氟弹性体组合物。

公开(公告)号：US20090023852A1

公开(公告)日：2009-01-22

申请号：US10585067

申请日：2005-01-31

申请人： Hiroyuki Tanaka ,  Kouji Fukuyama

发明人： Hiroyuki Tanaka ,  Kouji Fukuyama

IPC分类号： C08K3/04 ,  B32B5/16

CPC分类号： B82Y30/00 ,  C08J5/005 ,  C08J2327/12 ,  C08K3/04 ,  C08K3/045 ,  C08K2201/005 ,  C08K2201/011 ,  Y10T428/2982 ,  C08L27/12

摘要： The present invention provides a fluorine-containing elastomer composition which has small weight change for all the treatments of NF3 plasma, O2 plasma and CF4 plasma conducted in a manufacturing process of a semiconductor and significant plasma resistance, and a molded article comprising the fluorine-containing elastomer composition.

摘要翻译： 本发明提供了一种含氟弹性体组合物，其在半导体制造过程中进行的所有NF3等离子体，O 2等离子体和CF 4等离子体处理的重量变化小，并且具有显着的等离子体电阻， 弹性体组成。

公开(公告)号：US4565943A

公开(公告)日：1986-01-21

申请号：US606136

申请日：1984-05-02

申请人： Junichi Sako ,  Toshiharu Yagi ,  Yoshihide Higashihata ,  Kouji Fukuyama

发明人： Junichi Sako ,  Toshiharu Yagi ,  Yoshihide Higashihata ,  Kouji Fukuyama

IPC分类号： H01L41/193 ,  H01L41/45 ,  H01L41/08

CPC分类号： H01L41/45 ,  H01L41/193 ,  H01L41/257 ,  Y10S310/80 ,  Y10T29/42

摘要： A process for preparing a polymeric piezoelectric material which comprises a vinylidene fluoride containing polymer, comprising applying at least two cycles of alternate electric field except a rectangular wave to the material to polarize it, by which process, the polymeric piezoelectric material is prepared at a low temperature for a short time.

摘要翻译： 一种制备包含含偏二氟乙烯的聚合物的聚合物压电材料的方法，包括将至少两个循环的除了矩形波之外的交替电场施加到所述材料以使其极化，通过该方法，聚合物压电材料在低 温度很短的时间。

公开(公告)号：US6166484A

公开(公告)日：2000-12-26

申请号：US124757

申请日：1998-07-29

申请人： Nobutaka Okuyama ,  Kouji Fukuyama ,  Soichi Sakurai ,  Hiroshi Yoshioka ,  Masao Obara ,  Misao Ikeda ,  Takeshi Chiba

发明人： Nobutaka Okuyama ,  Kouji Fukuyama ,  Soichi Sakurai ,  Hiroshi Yoshioka ,  Masao Obara ,  Misao Ikeda ,  Takeshi Chiba

IPC分类号： H01J29/76 ,  H01J29/86

CPC分类号： H01J29/76 ,  H01J29/861 ,  H01J2229/8606 ,  H01J2229/8616

摘要： A deflection yoke for a CRT including a horizontal deflection coil having an axial length in an axial direction of the CRT in an installed position that is not less than 60 mm and not more than 80 mm, a vertical deflection coil having an axial length in an axial direction that ranges from 45 mm to 65 mm, and a core having an axial length in the axial direction that ranges from 25 mm to 45 mm. The subject deflection yoke prevents deterioration in horizontal and vertical deflection sensitivity in CRTs having a neck diameter that is greater than 22 mm and less than 26 mm with a deflection angle that ranges from 95 to 110 degrees. In an alternate embodiment a deflection yoke for a CRT including a horizontal deflection coil, a vertical deflection coil disposed outside of the horizontal deflection coil, and a core disposed outside of the vertical deflection coil wherein in an installed position of the yoke, an inner surface of the deflection yoke is circumscribed around a circle having a diameter of 56.5 mm and the horizontal deflection coil has a length thereof extending from the tube axial position to an opening end of the horizontal deflection coil ranges from 20.5 mm to 24.5 mm and a length thereof extending from the tube axial position to a neck end of the horizontal deflection coil ranges from 46 mm to 50 mm. The subject deflection yoke reduces neck shadow in color CRTs having a 95 to 105 degree deflection with a 400 to 420 mm diagonal and a neck having an outside diameter form 23.6 mm to 25.0 mm at a portion where the deflection yoke is attached.

摘要翻译： 一种用于CRT的偏转线圈，包括：水平偏转线圈，其在CRT的轴向方向上的轴向长度不小于60mm且不大于80mm的安装位置;垂直偏转线圈，其轴向长度为 轴向方向为45mm至65mm，轴的轴向长度为25mm至45mm的芯。 对象偏转线圈防止颈部直径大于22mm且小于26mm的CRT中的水平和垂直偏转灵敏度的变化，偏转角度范围为95至110度。 在替代实施例中，一种用于CRT的偏转线圈包括水平偏转线圈，设置在水平偏转线圈外侧的垂直偏转线圈和设置在垂直偏转线圈外侧的芯，其中在轭的安装位置，内表面 的偏转线圈围绕直径为56.5mm的圆周围，并且水平偏转线圈的长度从管轴向位置延伸到水平偏转线圈的开口端的范围为20.5mm至24.5mm，其长度 从管轴位置延伸到水平偏转线圈的颈端的范围为46mm至50mm。 被摄体偏转线圈在偏转线圈附着的部分处减小了具有对角线的400至420mm的具有95至105度偏转的彩色CRT中的颈部阴影和具有23.6mm至25.0mm的外径的颈部。