Invention Grant
- Patent Title: Electronic cooling device and fabrication method thereof
- Patent Title (中): 电子冷却装置及其制造方法
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Application No.: US12001679Application Date: 2007-12-11
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Publication No.: US07679183B2Publication Date: 2010-03-16
- Inventor: Chang Hun Han
- Applicant: Chang Hun Han
- Applicant Address: KR Seoul
- Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: The Law Offices of Andrew D. Fortney
- Agent Andrew D. Fortney; William E. Brow
- Priority: KR10-2006-0131297 20061220
- Main IPC: H01L23/34
- IPC: H01L23/34

Abstract:
Provided are an electronic cooling device and a fabrication method thereof. The method may include forming an insulating layer on a semiconductor substrate, forming first and second silicide layers on the insulating layer, forming separate paired p-type and n-type semiconductors on each of the first and second silicide layers, forming a first interlayer dielectric (ILD) layer on the p-type and n-type semiconductors, exposing top surfaces of the n-type and p-type semiconductors, forming a third silicide layer on one semiconductor on each of the first and second silicide layers, forming a second ILD layer on the third silicide layer, and etching the second and first ILD layers to form contact holes exposing top surfaces of the first and second silicide layers.
Public/Granted literature
- US20080149939A1 Electronic cooling device and fabrication method thereof Public/Granted day:2008-06-26
Information query
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