Invention Grant
- Patent Title: Long wavelength vertical cavity surface emitting laser device and method of fabricating the same
- Patent Title (中): 长波长垂直腔表面发射激光器件及其制造方法
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Application No.: US11951133Application Date: 2007-12-05
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Publication No.: US07680162B2Publication Date: 2010-03-16
- Inventor: Mi-Ran Park , O-Kyun Kwon
- Applicant: Mi-Ran Park , O-Kyun Kwon
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2006-0123410 20061206; KR10-2007-0047284 20070515
- Main IPC: H01S3/04
- IPC: H01S3/04

Abstract:
Provided is a vertical cavity surface emitting device. The surface emitting device includes a lower mirror layer emitting light having a long wavelength, an active layer providing an optical gain, a tunnel junction layer for confining a current, and an upper mirror layer, which are sequentially stacked on a compound semiconductor substrate, wherein a heat release layer is formed on side surfaces of at least one of the active layer, the tunnel junction layer and the upper mirror layer by using etching process, and the heat release layer has greater thermal conductivity than at least one of the active layer, the tunnel junction layer and the upper mirror layer.
Public/Granted literature
- US20080137692A1 LONG WAVELENGTH VERTICAL CAVITY SURFACE EMITTING LASER DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2008-06-12
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