Invention Grant
US07680162B2 Long wavelength vertical cavity surface emitting laser device and method of fabricating the same 有权
长波长垂直腔表面发射激光器件及其制造方法

Long wavelength vertical cavity surface emitting laser device and method of fabricating the same
Abstract:
Provided is a vertical cavity surface emitting device. The surface emitting device includes a lower mirror layer emitting light having a long wavelength, an active layer providing an optical gain, a tunnel junction layer for confining a current, and an upper mirror layer, which are sequentially stacked on a compound semiconductor substrate, wherein a heat release layer is formed on side surfaces of at least one of the active layer, the tunnel junction layer and the upper mirror layer by using etching process, and the heat release layer has greater thermal conductivity than at least one of the active layer, the tunnel junction layer and the upper mirror layer.
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