发明授权
- 专利标题: Self-aligned precision datums for array die placement
- 专利标题(中): 用于阵列管芯放置的自对准精密基准
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申请号: US12422532申请日: 2009-04-13
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公开(公告)号: US07681985B2公开(公告)日: 2010-03-23
- 发明人: Peter J. Nystrom , Peter M. Gulvin , John P. Meyers
- 申请人: Peter J. Nystrom , Peter M. Gulvin , John P. Meyers
- 申请人地址: US CT Norwalk
- 专利权人: Xerox Corporation
- 当前专利权人: Xerox Corporation
- 当前专利权人地址: US CT Norwalk
- 代理机构: MH2 Technology Law Group
- 主分类号: B41J2/25
- IPC分类号: B41J2/25
摘要:
A method and resulting device for accurately positioning an array of die modules in an imaging array, including larger partial width arrays and full page width arrays, is described herein. The method includes forming physical reference datum directly on an individual silicon die module, and positioning the individual die modules on a temporary holder. The temporary holder includes an alignment tool and singulated die are placed onto the temporary holder by abutting the physical reference datum against the alignment tool. A vacuum temporarily secures the die positioned on the temporary holder, and a permanent substrate is then attached to the die of the temporary holder. The temporary holder is released in favor of the permanent substrate having the accurately aligned die modules thereon.
公开/授权文献
- US20090201328A1 SELF-ALIGNED PRECISION DATUMS FOR ARRAY DIE PLACEMENT 公开/授权日:2009-08-13
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