Invention Grant
- Patent Title: Frontside structure damage protected megasonics clean
- Patent Title (中): 前端结构损坏保护了超声波清洁
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Application No.: US11973039Application Date: 2007-10-04
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Publication No.: US07682457B2Publication Date: 2010-03-23
- Inventor: Zhiyong Li , Jianshe Tang , Bo Xie , Wei Lu
- Applicant: Zhiyong Li , Jianshe Tang , Bo Xie , Wei Lu
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely Sokoloff Taylor & Zafman LLP
- Main IPC: B08B3/12
- IPC: B08B3/12
Abstract:
An apparatus and method for removing contaminants from a workpiece is described. Embodiments of the invention describe placing a workpiece on a holding bracket within a process chamber to hold and rotate the workpiece to be cleaned. A first cleaning fluid is provided to the workpiece non-device side, while a degasified liquid is provided to the workpiece device side during megasonic cleaning. The degasified liquid inhibits cavitation from occurring on and damaging the device side of the workpiece during megasonic cleaning.
Public/Granted literature
- US20090090381A1 Frontside structure damage protected megasonics clean Public/Granted day:2009-04-09
Information query
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