公开(公告)号：US07682457B2

公开(公告)日：2010-03-23

申请号：US11973039

申请日：2007-10-04

申请人： Zhiyong Li ,  Jianshe Tang ,  Bo Xie ,  Wei Lu

发明人： Zhiyong Li ,  Jianshe Tang ,  Bo Xie ,  Wei Lu

IPC分类号： B08B3/12

CPC分类号： B08B3/12 ,  H01L21/67051 ,  Y10S134/902

摘要： An apparatus and method for removing contaminants from a workpiece is described. Embodiments of the invention describe placing a workpiece on a holding bracket within a process chamber to hold and rotate the workpiece to be cleaned. A first cleaning fluid is provided to the workpiece non-device side, while a degasified liquid is provided to the workpiece device side during megasonic cleaning. The degasified liquid inhibits cavitation from occurring on and damaging the device side of the workpiece during megasonic cleaning.

摘要翻译： 描述了用于从工件去除污染物的设备和方法。 本发明的实施例描述了将工件放置在处理室内的保持支架上以保持和旋转待清洁的工件。 第一清洗流体被提供给工件非装置侧，而在兆声波清洗期间将脱气液体提供给工件装置侧。 在超声波清洗过程中，脱气液体会抑制气蚀发生并破坏工件的装置侧。

公开(公告)号：US20090090381A1

公开(公告)日：2009-04-09

申请号：US11973039

申请日：2007-10-04

申请人： Zhiyong Li ,  Jianshe Tang ,  Bo Xie ,  Wei Lu

发明人： Zhiyong Li ,  Jianshe Tang ,  Bo Xie ,  Wei Lu

IPC分类号： B08B3/10 ,  B08B13/00 ,  B08B3/12

CPC分类号： B08B3/12 ,  H01L21/67051 ,  Y10S134/902

摘要： An apparatus and method for removing contaminants from a workpiece is described. Embodiments of the invention describe placing a workpiece on a holding bracket within a process chamber to hold and rotate the workpiece to be cleaned. A first cleaning fluid is provided to the workpiece non-device side, while a degasified liquid is provided to the workpiece device side during megasonic cleaning. The degasified liquid inhibits cavitation from occurring on and damaging the device side of the workpiece during megasonic cleaning.

摘要翻译： 描述了用于从工件去除污染物的设备和方法。 本发明的实施例描述了将工件放置在处理室内的保持支架上以保持和旋转待清洁的工件。 第一清洗流体被提供给工件非装置侧，而在兆声波清洗期间将脱气液体提供给工件装置侧。 在超声波清洗过程中，脱气液体会抑制气蚀发生并破坏工件的装置侧。

公开(公告)号：US20080163891A1

公开(公告)日：2008-07-10

申请号：US11621855

申请日：2007-01-10

申请人： JIANSHE TANG ,  Wei Lu ,  Bo Xie ,  Elias Martinez ,  Zhiyong Li ,  Kent Child ,  Richard Endo ,  Konstantin Smekalin

发明人： JIANSHE TANG ,  Wei Lu ,  Bo Xie ,  Elias Martinez ,  Zhiyong Li ,  Kent Child ,  Richard Endo ,  Konstantin Smekalin

IPC分类号： B08B3/00

CPC分类号： H01L21/02065 ,  H01L21/02057 ,  H01L21/67051

摘要： An apparatus for cleaning a wafer has a first chamber and a component coupled to the first chamber. The first chamber has a first input to form de-ionized water droplets. The component is coupled to the first chamber to further atomize and apply the atomized de-ionized water droplets on the wafer.

摘要翻译： 用于清洁晶片的装置具有第一室和耦合到第一室的部件。 第一室具有形成去离子水滴的第一输入。 该组件耦合到第一室以进一步雾化并将雾化的去离子水滴施加在晶片上。

公开(公告)号：US20080053486A1

公开(公告)日：2008-03-06

申请号：US11891339

申请日：2007-08-09

申请人： Jianshe Tang ,  Wei Lu ,  Zhiyong Li ,  Bo Xie ,  Alexander Ko

发明人： Jianshe Tang ,  Wei Lu ,  Zhiyong Li ,  Bo Xie ,  Alexander Ko

IPC分类号： B08B3/02

CPC分类号： B08B3/04 ,  B08B3/02 ,  H01L21/67028

摘要： A semiconductor substrate processing apparatus and a method for processing semiconductor substrates are provided. The semiconductor substrate processing apparatus may include a liquid container where a semiconductor substrate may be immersed in a semiconductor processing liquid. The semiconductor substrate may then be removed from the semiconductor processing liquid while vapor is directed at a surface of the semiconductor substrate where the semiconductor substrate contacts a surface of the processing liquid.

摘要翻译： 提供半导体衬底处理设备和半导体衬底的处理方法。 半导体基板处理装置可以包括其中半导体基板可以浸入半导体处理液体中的液体容器。 然后可以从半导体处理液体中去除半导体衬底，同时蒸汽指向半导体衬底的半导体衬底接触处理液表面的表面。

公开(公告)号：US10520440B2

公开(公告)日：2019-12-31

申请号：US14377524

申请日：2012-02-08

申请人： Devin Alexander Mourey ,  James William Stasiak ,  James Elmer Abbott, Jr. ,  Zhiyong Li

发明人： Devin Alexander Mourey ,  James William Stasiak ,  James Elmer Abbott, Jr. ,  Zhiyong Li

IPC分类号： G01J3/44 ,  G01N21/65

摘要： Molecule sensing apparatus. The apparatus has first and second chambers, an input port extending into the first chamber, a fluid channel extending from the first chamber to the second chamber, and a surface-enhanced substrate in the second chamber.

公开(公告)号：US09709538B2

公开(公告)日：2017-07-18

申请号：US14239330

申请日：2011-09-30

申请人： Wei Wu ,  Zhiyong Li ,  Ansoon Kim ,  Min Hu ,  Michael Josef Stuke

发明人： Wei Wu ,  Zhiyong Li ,  Ansoon Kim ,  Min Hu ,  Michael Josef Stuke

IPC分类号： G01N31/22 ,  G01N21/64 ,  G01N21/65 ,  B01L3/00 ,  B82Y15/00

CPC分类号： G01N31/22 ,  B01L3/5085 ,  B01L3/50853 ,  B01L2200/141 ,  B01L2300/0636 ,  B01L2300/069 ,  B01L2300/0819 ,  B82Y15/00 ,  G01N21/648 ,  G01N21/658 ,  G01N2201/0227 ,  G01N2201/023 ,  Y10T436/25

摘要： Devices to detect a substance and methods of producing such a device are disclosed. An example device to detect a substance includes a housing defining an externally accessible chamber and a seal to enclose at least a portion of the chamber. The example device also includes a substrate includes nanoparticles positioned within the chamber. The nanoparticles to react to the substance when exposed thereto. The example device also includes a non-analytic solution within the chamber to protect the nanoparticles from premature exposure.

公开(公告)号：US09678013B2

公开(公告)日：2017-06-13

申请号：US14394295

申请日：2012-04-20

申请人： Alexandre M. Bratkovski ,  Zhiyong Li ,  Wei Wu ,  Min Hu ,  R. Stanley Williams ,  Ansoon Kim

发明人： Alexandre M. Bratkovski ,  Zhiyong Li ,  Wei Wu ,  Min Hu ,  R. Stanley Williams ,  Ansoon Kim

IPC分类号： G01N21/01 ,  G01N21/65 ,  G01N35/00 ,  B01L3/00 ,  G01N21/64

CPC分类号： G01N21/658 ,  B01L3/5088 ,  B01L2300/0627 ,  B01L2300/0819 ,  B01L2300/161 ,  G01N21/648 ,  G01N35/00009 ,  G01N2035/00019

摘要： Examples of integrated sensors are disclosed herein. An example of an integrated sensor includes a substrate and a sensing member formed on a surface of the substrate. The sensing member includes collapsible signal amplifying structures and an area surrounding the collapsible signal amplifying structures that enables self-positioning of droplets exposed thereto toward the collapsible signal amplifying structures.

公开(公告)号：US09592001B2

公开(公告)日：2017-03-14

申请号：US14406601

申请日：2012-07-29

申请人： Steven Barcelo ,  Zhiyong Li ,  Ansoon Kim ,  Gary Gibson

发明人： Steven Barcelo ,  Zhiyong Li ,  Ansoon Kim ,  Gary Gibson

IPC分类号： G01J3/44 ,  A61B5/1459 ,  G01N21/65 ,  A61B5/00

CPC分类号： A61B5/1459 ,  A61B5/0075 ,  A61B5/6862 ,  G01N21/658

摘要： An implantable nanosensor includes a stent to be implanted inside a fluid conduit. The stent has a well in a surface of the stent. The implantable nanosensor further includes a nanoscale-patterned sensing substrate disposed in the well. The nanoscale-patterned sensing substrate is to produce an optical scattering response signal indicative of a presence of an analyte in a fluid carried by the fluid conduit when interrogated by an optical stimulus signal.

摘要翻译： 可植入纳米传感器包括待植入流体导管内的支架。 支架在支架表面有一个井。 可植入纳米传感器还包括设置在井中的纳米级图案感测基片。 纳米级图案化感测衬底将产生光学散射响应信号，该信号指示由光学刺激信号询问时由流体导管携带的流体中分析物的存在。

公开(公告)号：US09310306B2

公开(公告)日：2016-04-12

申请号：US14006436

申请日：2011-03-24

申请人： Zhiyong Li ,  Ivan Naumov ,  Farzad Parvaresh

发明人： Zhiyong Li ,  Ivan Naumov ,  Farzad Parvaresh

IPC分类号： G01J3/44 ,  G01N21/65 ,  B05D3/00

CPC分类号： G01N21/65 ,  B05D3/007 ,  G01N21/658

摘要： An apparatus for use in sensing applications includes a substrate and a plurality of clusters arranged in an aperiodic configuration on the substrate, wherein each of the plurality of clusters is formed of a plurality of Raman-active material nano-particles, and wherein each of the Raman-active material nano-particles is positioned in a substantially ordered configuration with respect to each other in each of the respective plurality of clusters.

摘要翻译： 用于感测应用的装置包括基板和在基板上以非周期配置布置的多个簇，其中多个簇中的每一个由多个拉曼活性材料纳米颗粒形成，并且其中 拉曼活性材料纳米颗粒在相应的多个簇中的每一个中相对于彼此定位成基本排列的构型。

公开(公告)号：US20150241355A1

公开(公告)日：2015-08-27

申请号：US14406653

申请日：2012-07-31

申请人： Shih-Yuan Wang ,  Gary Gibson ,  Zhiyong Li ,  Alexandre M. Bratkovski ,  Steven Barcelo ,  Ansoon Kim ,  Mineo Yamakawa ,  Zhang-Lin Zhou ,  Huei Pei Kuo

发明人： Shih-Yuan Wang ,  Gary Gibson ,  Zhiyong Li ,  Alexandre M. Bratkovski ,  Steven Barcelo ,  Ansoon Kim ,  Mineo Yamakawa ,  Zhang-Lin Zhou ,  Huei Pei Kuo

IPC分类号： G01N21/65 ,  A61F2/02 ,  A61F2/82 ,  G02B5/10

CPC分类号： G01N21/658 ,  A61F2/02 ,  A61F2/82 ,  G01N2201/068 ,  G02B5/10 ,  Y10T29/49826

摘要： According to an example, an apparatus for performing spectroscopy includes a parabolic reflector and a plurality of surface-enhanced Raman spectroscopy (SERS) elements spaced from the parabolic reflector and positioned substantially at a focal point of the parabolic reflector. The parabolic reflector is to reflect Raman scattered light emitted from molecules in a near field generated by the plurality of SERS elements to substantially increase the flux of the Raman scattered light emitted out of the apparatus.

摘要翻译： 根据一个实例，用于执行光谱学的装置包括抛物面反射器和与抛物面反射器间隔开并且基本上位于抛物面反射器的焦点的多个表面增强拉曼光谱（SERS）元件。 抛物面反射器是反射由多个SERS元件产生的近场中的分子发射的拉曼散射光，以大大增加从该装置发出的拉曼散射光的通量。