Invention Grant
US07682574B2 Safety, monitoring and control features for thermal abatement reactor
失效
热消除反应堆的安全，监控和控制功能
- Patent Title: Safety, monitoring and control features for thermal abatement reactor
- Patent Title (中): 热消除反应堆的安全，监控和控制功能
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Application No.: US10991740Application Date: 2004-11-18
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Publication No.: US07682574B2Publication Date: 2010-03-23
- Inventor: Ho-Man Rodney Chiu , Daniel O. Clark , Shaun W. Crawford , Jay J. Jung , Youssef A. Loldj , Robbert Vermeulen
- Applicant: Ho-Man Rodney Chiu , Daniel O. Clark , Shaun W. Crawford , Jay J. Jung , Youssef A. Loldj , Robbert Vermeulen
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Dugan & Dugan, PC
- Main IPC: B01J19/00
- IPC: B01J19/00
Abstract:
The present invention relates to a thermal reactor apparatus used to treat industrial effluent fluids, for example waste effluent produced in semiconductor and liquid crystal display manufacturing processes. Specifically, the present invention relates to improved monitoring and control features for the thermal reactor apparatus, including a flame sensing device, an intrinsically safe flammable gas sensing device, and a sequential mode of operation having built-in safety redundancy. The improved monitoring and control features ensure the safe and efficient abatement of waste effluent within the thermal reactor apparatus.
Public/Granted literature
- US20060104878A1 Safety, monitoring and control features for thermal abatement reactor Public/Granted day:2006-05-18
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