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1.发明授权公开(公告)号：US07736599B2
公开(公告)日：2010-06-15
申请号：US10987921
申请日：2004-11-12
申请人： Ho-Man Rodney Chiu , Daniel O. Clark , Shaun W. Crawford , Jay J. Jung , Leonard B. Todd , Robbert Vermeulen
发明人： Ho-Man Rodney Chiu , Daniel O. Clark , Shaun W. Crawford , Jay J. Jung , Leonard B. Todd , Robbert Vermeulen
CPC分类号： F23M5/085 , F23D2900/00016 , F23G7/065 , F23J9/00 , F23M2900/05002 , F23M2900/05004
摘要： The present invention relates to systems and methods for controlled combustion and decomposition of gaseous pollutants while reducing deposition of unwanted reaction products from within the treatment systems. The systems include a novel thermal reaction chamber design having stacked reticulated ceramic rings through which fluid, e.g., gases, may be directed to form a boundary layer along the interior wall of the thermal reaction chamber, thereby reducing particulate matter buildup thereon. The systems further include the introduction of fluids from the center pilot jet to alter the aerodynamics of the interior of the thermal reaction chamber.
摘要翻译： 本发明涉及用于气态污染物的受控燃烧和分解的系统和方法，同时减少不需要的反应产物从处理系统内的沉积。 该系统包括具有堆叠的网状陶瓷环的新型热反应室设计，通过该陶瓷环可以使流体（例如气体）被引导以沿着热反应室的内壁形成边界层，从而减少其上积累的颗粒物质。 这些系统还包括从中心先导射流引入流体以改变热反应室内部的空气动力学。
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2.发明申请APPARATUS AND METHODS FOR REDUCING RESTRICTIONS TO AIR FLOW IN AN ABATEMENT SYSTEM 审中-公开在减少系统中减少空气流动限制的装置和方法公开(公告)号：US20090148339A1
公开(公告)日：2009-06-11
申请号：US12271879
申请日：2008-11-15
申请人： Mark W. Curry , Shaun W. Crawford , Barry Page , Robbert M. Vermeulen , Allen Fox , Daniel S. Brown , Rene Correa , Youssef A. Loldj , William D. Pyzel , Daniel O. Clark
发明人： Mark W. Curry , Shaun W. Crawford , Barry Page , Robbert M. Vermeulen , Allen Fox , Daniel S. Brown , Rene Correa , Youssef A. Loldj , William D. Pyzel , Daniel O. Clark
IPC分类号： A61L9/015
CPC分类号： B01D53/38 , B01D2257/108
摘要： An abatement system is provided, including an abatement unit adapted to abate effluent using ambient air; and an ambient air delivery system in fluid communication with the abatement unit and adapted to deliver ambient air to the abatement unit; wherein the ambient air delivery system allows sufficient ambient air to flow into the abatement unit to abate the effluent without compressed air. Numerous other aspects are provided.
摘要翻译： 提供减排系统，包括减排单位，适用于使用环境空气消除污水; 以及与减排单元流体连通并适于将环境空气输送到减排单元的环境空气输送系统; 其中环境空气输送系统允许足够的环境空气流入减排单元以消除没有压缩空气的流出物。 提供了许多其他方面。
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公开(公告)号：US20080290041A1
公开(公告)日：2008-11-27
申请号：US12126920
申请日：2008-05-25
申请人： Daniel O. Clark , Robbert M. Vermeulen , Youssef A. Loldj , Belynda Flippo , Mehran Moalem , Shaun W. Crawford
发明人： Daniel O. Clark , Robbert M. Vermeulen , Youssef A. Loldj , Belynda Flippo , Mehran Moalem , Shaun W. Crawford
IPC分类号： G05B11/00
摘要： A method of operating an electronic device manufacturing system is provided which includes the steps of receiving information with an interface, wherein the information relates to an abatement system, and shutting down a process tool and an abatement tool in response to the information.
摘要翻译： 提供了一种操作电子设备制造系统的方法，其包括以界面接收信息的步骤，其中所述信息涉及减排系统，以及响应于所述信息关闭处理工具和减排工具。
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公开(公告)号：US20080047586A1
公开(公告)日：2008-02-28
申请号：US11844268
申请日：2007-08-23
CPC分类号： B01D53/30 , B01D2257/2027 , B01D2257/204 , B01D2257/2047 , B01D2257/2066 , B01D2258/0216
摘要： Methods and systems are provided for abating effluent from a process tool. The invention includes one or more process tools; one or more abatement systems; and an interface manifold adapted to establish effluent fluid communication between the one or more process tools and the one or more abatement systems, wherein the interface manifold is configured to selectively direct one or more effluents from between the one or more process tools to the one or more abatement systems in response to a control signal. Numerous other aspects are provided.
摘要翻译： 提供了方法和系统来减轻加工工具的污水。 本发明包括一个或多个加工工具; 一个或多个减排系统; 以及界面歧管，其适于在所述一个或多个处理工具和所述一个或多个消除系统之间建立流出物流体连通，其中所述界面歧管被配置为选择性地将一个或多个流出物从所述一个或多个过程工具之间引导到所述一个或多个处理工具 更多的减排系统响应控制信号。 提供了许多其他方面。
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公开(公告)号：US08095240B2
公开(公告)日：2012-01-10
申请号：US12257888
申请日：2008-10-24
申请人： Ho-Man Rodney Chiu , Daniel O. Clark , Shaun W. Crawford , Jay J. Jung , Youssef A. Loldj , Robbert M. Vermeulen
发明人： Ho-Man Rodney Chiu , Daniel O. Clark , Shaun W. Crawford , Jay J. Jung , Youssef A. Loldj , Robbert M. Vermeulen
CPC分类号： F23G5/50 , B01D2258/0216 , F23G7/065 , F23K5/005 , F23N5/08 , F23N5/242 , F23N2027/02 , F23N2027/04 , F23N2029/02 , F23N2031/08 , F23N2031/18
摘要： A flame sensor apparatus for use with a flame heated thermal abatement reactor is provided, including a flame sensor adapted to sense a flame within the thermal abatement reactor; and a shutter adapted to selectively block the transmission of radiation from the flame to the flame sensor.
摘要翻译： 提供了一种与火焰加热的热消除反应器一起使用的火焰传感器装置，其包括适于感测热消除反应器内的火焰的火焰传感器; 以及适于选择性地阻挡从火焰到火焰传感器的辐射传输的快门。
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6.发明授权Apparatus and methods for ambient air abatement of electronic manufacturing effluent 失效环境空气减少电子制造废水的装置和方法公开(公告)号：US08003067B2
公开(公告)日：2011-08-23
申请号：US12053480
申请日：2008-03-21
申请人： Mark W. Curry , Barry Page , Shaun W. Crawford , Robbert Vermeulen , William D. Pyzel , Youssef Loldj , Rene T. Correa , Daniel S. Brown , Allen Fox
发明人： Mark W. Curry , Barry Page , Shaun W. Crawford , Robbert Vermeulen , William D. Pyzel , Youssef Loldj , Rene T. Correa , Daniel S. Brown , Allen Fox
IPC分类号： B01D53/74
CPC分类号： B01D53/76 , B01D53/46 , B01D2251/11 , B01D2257/00 , B01D2257/108 , B01D2258/0216 , Y02W10/37
摘要： An abatement system is provided which includes 1) an abatement unit adapted to abate effluent; and 2) an ambient air supply system. The ambient air supply system includes an air moving device, wherein the ambient air supply system is adapted to supply ambient air to the abatement unit for use as an oxidant. Numerous other aspects are provided.
摘要翻译： 提供减排系统，其中包括：1）减排装置，用于消除流出物; 和2）环境空气供应系统。 环境空气供应系统包括空气移动装置，其中环境空气供应系统适于将环境空气供应到减排单元以用作氧化剂。 提供了许多其他方面。
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公开(公告)号：US20100143222A1
公开(公告)日：2010-06-10
申请号：US12613886
申请日：2009-11-06
申请人： Phil Chandler , Shaun W. Crawford
发明人： Phil Chandler , Shaun W. Crawford
CPC分类号： F01N5/02 , F01N3/02 , F01N3/24 , F01N2240/02 , F01N2240/22 , F23G7/065 , F23J15/06 , Y02T10/16 , Y02T10/20
摘要： Exhaust condensate removal apparatuses for abatement systems and methods of removing exhaust condensate from abatement systems are described. An exhaust condensate removal apparatus includes a cabinet exhaust and a process gas exhaust, the process exhaust openly cross-exchanged with the cabinet exhaust. Another exhaust condensate removal apparatus includes a cabinet exhaust and a process gas exhaust, the process exhaust closedly cross-exchanged with the cabinet exhaust.
摘要翻译： 描述用于减排系统的排气冷凝物去除装置和从减排系统中除去排出冷凝物的方法。 排气冷凝物去除装置包括机柜排气和工艺气体排气，工艺废气与柜体排气口交叉交换。 另一种排气冷凝物去除装置包括机柜排气和工艺气体排气，工艺废气与机柜排气口完全交换。
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8.发明申请公开(公告)号：US20090110622A1
公开(公告)日：2009-04-30
申请号：US12258395
申请日：2008-10-25
申请人： Ho-Man Rodney Chiu , Daniel O. Clark , Shaun W. Crawford , Jay J. Jung , Youssef A. Loldj , Robbert M. Vermeulen
发明人： Ho-Man Rodney Chiu , Daniel O. Clark , Shaun W. Crawford , Jay J. Jung , Youssef A. Loldj , Robbert M. Vermeulen
IPC分类号： B01D53/68
CPC分类号： B01D53/346 , B01D53/38 , B01D53/77 , B01D2251/102 , B01D2251/11 , B01D2258/0216 , C23C16/4412
摘要： A method for abating effluent from an electronic device manufacturing process is provided, including abating the effluent in a thermal abatement tool to form abated effluent; determining whether the abated effluent contains one or more chemical species of interest; and changing one or more operating parameters of the thermal abatement tool based upon the determination. Numerous other embodiments are provided.
摘要翻译： 提供了一种从电子设备制造过程中消除流出物的方法，包括减轻热消除工具中的流出物以形成减少的流出物; 确定减排的污水是否含有一种或多种感兴趣的化学物质; 以及基于所述确定改变所述热消除工具的一个或多个操作参数。 提供了许多其他实施例。
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9.发明授权公开(公告)号：US08668868B2
公开(公告)日：2014-03-11
申请号：US12258395
申请日：2008-10-25
申请人： Ho-Man Rodney Chiu , Daniel O. Clark , Shaun W. Crawford , Jay J. Jung , Youssef A. Loldj , Robbert M. Vermeulen
发明人： Ho-Man Rodney Chiu , Daniel O. Clark , Shaun W. Crawford , Jay J. Jung , Youssef A. Loldj , Robbert M. Vermeulen
CPC分类号： B01D53/346 , B01D53/38 , B01D53/77 , B01D2251/102 , B01D2251/11 , B01D2258/0216 , C23C16/4412
摘要： A method for abating effluent from an electronic device manufacturing process is provided, including abating the effluent in a thermal abatement tool to form abated effluent; determining whether the abated effluent contains one or more chemical species of interest; and changing one or more operating parameters of the thermal abatement tool based upon the determination. Numerous other embodiments are provided.
摘要翻译： 提供了一种从电子设备制造过程中消除流出物的方法，包括减轻热消除工具中的流出物以形成减少的流出物; 确定减排的污水是否含有一种或多种感兴趣的化学物质; 以及基于所述确定改变所述热消除工具的一个或多个操作参数。 提供了许多其他实施例。
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10.发明授权公开(公告)号：US07985379B2
公开(公告)日：2011-07-26
申请号：US11838435
申请日：2007-08-14
申请人： Ho-Man Rodney Chiu , Daniel O. Clark , Shaun W. Crawford , Jay J. Jung , Leonard B. Todd , Robbert Vermeulen
发明人： Ho-Man Rodney Chiu , Daniel O. Clark , Shaun W. Crawford , Jay J. Jung , Leonard B. Todd , Robbert Vermeulen
IPC分类号： B01D50/00
CPC分类号： F23M5/085 , F23D2900/00016 , F23G7/065 , F23J9/00 , F23M2900/05002 , F23M2900/05004
摘要： The present invention relates to systems and methods for controlled combustion and decomposition of gaseous pollutants while reducing deposition of unwanted reaction products from within the treatment systems. The systems include a novel thermal reaction chamber design having stacked reticulated ceramic rings through which fluid, e.g., gases, may be directed to form a boundary layer along the interior wall of the thermal reaction chamber, thereby reducing particulate matter buildup thereon. The systems further include the introduction of fluids from the center pilot jet to alter the aerodynamics of the interior of the thermal reaction chamber.
摘要翻译： 本发明涉及用于气态污染物的受控燃烧和分解的系统和方法，同时减少不需要的反应产物从处理系统内的沉积。 该系统包括具有堆叠的网状陶瓷环的新型热反应室设计，通过该陶瓷环可以使流体（例如气体）被引导以沿着热反应室的内壁形成边界层，从而减少其上积累的颗粒物质。 这些系统还包括从中心先导射流引入流体以改变热反应室内部的空气动力学。
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