Invention Grant
- Patent Title: Technique for improving ion implantation throughput and dose uniformity
- Patent Title (中): 提高离子注入量和剂量均匀性的技术
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Application No.: US11537050Application Date: 2006-09-29
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Publication No.: US07683347B2Publication Date: 2010-03-23
- Inventor: Atul Gupta , Anthony Renau , Donna Smatlak , Joseph C. Olson
- Applicant: Atul Gupta , Anthony Renau , Donna Smatlak , Joseph C. Olson
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01J37/317
- IPC: H01J37/317 ; H01L21/265

Abstract:
A technique for improving ion implantation throughput and dose uniformity is disclosed. In one exemplary embodiment, a method for improving ion implantation throughput and dose uniformity may comprise measuring an ion beam density distribution in an ion beam. The method may also comprise calculating an ion dose distribution across a predetermined region of a workpiece that results from a scan velocity profile, wherein the scan velocity profile comprises a first component and a second component that control a relative movement between the ion beam and the workpiece in a first direction and a second direction respectively, and wherein the ion dose distribution is based at least in part on the ion beam density distribution. The method may further comprise adjusting at least one of the first component and the second component of the scan velocity profile to achieve a desired ion dose distribution in the predetermined region of the workpiece.
Public/Granted literature
- US20080078953A1 TECHNIQUE FOR IMPROVING ION IMPLANTATION THROUGHPUT AND DOSE UNIFORMITY Public/Granted day:2008-04-03
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