发明授权
- 专利标题: Intermetallic diffusion block device and method of manufacture
- 专利标题(中): 金属间扩散块装置及其制造方法
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申请号: US12111510申请日: 2008-04-29
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公开(公告)号: US07683493B2公开(公告)日: 2010-03-23
- 发明人: Charles L. Arvin , Carla A. Bailey , Harry D. Cox , Hua Gan , Hsichang Liu , Arthur G. Merryman , Vall F. McClean , Srinivasa S. N. Reddy , Brian R. Sundlof
- 申请人: Charles L. Arvin , Carla A. Bailey , Harry D. Cox , Hua Gan , Hsichang Liu , Arthur G. Merryman , Vall F. McClean , Srinivasa S. N. Reddy , Brian R. Sundlof
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Cantor Colburn LLP
- 代理商 Joseph Petrokaitis
- 主分类号: H01L23/52
- IPC分类号: H01L23/52
摘要:
One embodiment of the present invention is directed to an under bump metallurgy material. The under bump metallurgy material of this embodiment includes an adhesion layer and a conduction layer formed on top of the adhesion layer. The under bump metallurgy material of this embodiment also includes a barrier layer plated on top of the conduction layer and a sacrificial layer plated on top of the barrier layer. The conduction layer of this embodiment includes a trench formed therein, the trench contacting a portion of the barrier layer and blocking a path of intermetallic formation between the conduction layer and the sacrificial layer.
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