发明授权
- 专利标题: Infrared ray sensing element and method of producing the same
- 专利标题(中): 红外线传感元件及其制造方法
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申请号: US11598196申请日: 2006-11-13
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公开(公告)号: US07687774B2公开(公告)日: 2010-03-30
- 发明人: Yoshimi Ohta , Masaki Hirota
- 申请人: Yoshimi Ohta , Masaki Hirota
- 申请人地址: JP Yokohama-shi
- 专利权人: Nissan Motor Co., Ltd.
- 当前专利权人: Nissan Motor Co., Ltd.
- 当前专利权人地址: JP Yokohama-shi
- 代理机构: Foley & Lardner LLP
- 优先权: JP2005-330371 20051115
- 主分类号: G01J5/02
- IPC分类号: G01J5/02
摘要:
An infrared ray sensing element, includes: 1) a semiconductor substrate; 2) an infrared ray receiver disposed above the semiconductor substrate in such a manner as to be isolated from the semiconductor substrate, the infrared ray receiver being configured to receive an infrared ray; and 3) a beam configured to support the infrared ray receiver to the semiconductor substrate and include a thermopile configured to sense a temperature increase of the infrared ray receiver, wherein one of the following has a cross sectional shape that includes at least one protruding part: i) the beam, and ii) the thermopile.
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