Invention Grant
- Patent Title: Sawing tile corners on probe card substrates
- Patent Title (中): 在探针卡片基板上锯切瓦角
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Application No.: US11455110Application Date: 2006-06-16
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Publication No.: US07692433B2Publication Date: 2010-04-06
- Inventor: Benjamin N. Eldridge , Roy J. Henson , Eric D. Hobbs , Peter B. Mathews , Makarand S. Shinde
- Applicant: Benjamin N. Eldridge , Roy J. Henson , Eric D. Hobbs , Peter B. Mathews , Makarand S. Shinde
- Applicant Address: US CA Livermore
- Assignee: FormFactor, Inc.
- Current Assignee: FormFactor, Inc.
- Current Assignee Address: US CA Livermore
- Agent N. Kenneth Burraston
- Main IPC: G01R31/26
- IPC: G01R31/26

Abstract:
A composite substrate for testing semiconductor devices is formed by selecting a plurality of substantially identical individual substrates, cutting a corner from at least some of the individual substrates in accordance with their position in a final array configuration, and then assembling the individual substrates into the final array configuration. The final array configuration of substrates with corners cut or sawed away conforms more closely to the surface area of a wafer being tested, and can easily fit within space limits of a test environment.
Public/Granted literature
- US20070290705A1 Sawing tile corners on probe card substrates Public/Granted day:2007-12-20
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