发明授权
- 专利标题: Regeneration process of alkaline permanganate etching solution and unit therefor
- 专利标题(中): 碱性高锰酸盐蚀刻溶液的再生过程及其单元
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申请号: US11739332申请日: 2007-04-24
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公开(公告)号: US07695638B2公开(公告)日: 2010-04-13
- 发明人: Norikazu Nakamura , Masao Nakazawa , Hidekazu Miyamoto , Kenji Miyazawa , Manabu Saito
- 申请人: Norikazu Nakamura , Masao Nakazawa , Hidekazu Miyamoto , Kenji Miyazawa , Manabu Saito
- 申请人地址: JP Nagano-shi
- 专利权人: Shinko Electric Industries Co., Ltd.
- 当前专利权人: Shinko Electric Industries Co., Ltd.
- 当前专利权人地址: JP Nagano-shi
- 代理机构: Rankin, Hill & Clark LLP
- 优先权: JP2006-316829 20061124
- 主分类号: C23F1/02
- IPC分类号: C23F1/02
摘要:
In a reaction chamber (20), a used alkaline permanganate etching solution (12) is accommodated and an alkaline earth hydroxide (14) such as calcium hydroxide is added in the reaction chamber, a liquid inside of the reaction chamber is agitated, the liquid is exhausted from a side portion or a top portion of the reaction chamber through a filter (28), a precipitate (26) adhered to the filter is scraped off, and a precipitate containing a hardly soluble or insoluble matter incapable of passing through the filter and accumulated on a bottom portion of the reaction chamber is exhausted from the reaction chamber.
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