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US07695638B2 Regeneration process of alkaline permanganate etching solution and unit therefor 失效
碱性高锰酸盐蚀刻溶液的再生过程及其单元

Regeneration process of alkaline permanganate etching solution and unit therefor
摘要:
In a reaction chamber (20), a used alkaline permanganate etching solution (12) is accommodated and an alkaline earth hydroxide (14) such as calcium hydroxide is added in the reaction chamber, a liquid inside of the reaction chamber is agitated, the liquid is exhausted from a side portion or a top portion of the reaction chamber through a filter (28), a precipitate (26) adhered to the filter is scraped off, and a precipitate containing a hardly soluble or insoluble matter incapable of passing through the filter and accumulated on a bottom portion of the reaction chamber is exhausted from the reaction chamber.
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