发明授权
- 专利标题: Methods of conducting wafer level burn-in of electronic devices
- 专利标题(中): 进行电子器件晶圆级老化的方法
-
申请号: US10486661申请日: 2002-08-12
-
公开(公告)号: US07700379B2公开(公告)日: 2010-04-20
- 发明人: Michael J. Haji-Sheikh , James R. Biard , Simon Rabinovich , James K. Guenter , Bobby M. Hawkins
- 申请人: Michael J. Haji-Sheikh , James R. Biard , Simon Rabinovich , James K. Guenter , Bobby M. Hawkins
- 申请人地址: US CA Sunnyvale
- 专利权人: Finisar Corporation
- 当前专利权人: Finisar Corporation
- 当前专利权人地址: US CA Sunnyvale
- 代理机构: Workman Nydegger
- 国际申请: PCT/US02/25640 WO 20020812
- 国际公布: WO03/017326 WO 20030227
- 主分类号: H01L21/66
- IPC分类号: H01L21/66 ; G01R31/26
摘要:
Methods of conducting wafer level burn-in (WLBI) of semiconductor devices are presented wherein systems are provided having at least two electrodes (210, 215). Electrical bias (920) and/or thermal power (925) is applied on each side of a wafer (100) having back and front electrical contacts for semiconductor devices borne by the wafer. A pliable conductive layer (910) is described for supplying pins on the device side of a wafer with electrical contact and/or also for providing protection to the wafer from mechanical pressure being applied to its surfaces. Use of a cooling system (950) is also described for enabling the application of a uniform temperature to a wafer undergoing burn-in. Wafer level burn-in is performed by applying electrical and physical contact (915) using an upper contact plate to individual contacts for the semiconductor devices; applying electrical and physical contact using a lower contact plate (910) to a substrate surface of said semiconductor wafer; providing electrical power (920) to said semiconductor devices through said upper and lower second contact plates from a power source coupled to said upper and lower contacts plates; monitoring and controlling electrical power (935) to said semiconductor devices for a period in accordance with a specified burn-in criteria; removing electrical power at completion of said period (955); and removing electrical and physical contact to said semiconductor wafer (965).