发明授权
US07705331B1 Methods and systems for providing illumination of a specimen for a process performed on the specimen
有权
用于提供样品照射的方法和系统，用于在样品上进行的过程
- 专利标题： Methods and systems for providing illumination of a specimen for a process performed on the specimen
- 专利标题（中）： 用于提供样品照射的方法和系统，用于在样品上进行的过程
-
申请号： US11771430申请日： 2007-06-29
-
公开(公告)号： US07705331B1公开(公告)日： 2010-04-27
- 发明人: Greg Kirk , Rich Solarz , Chris Kirk , Gil Delgado , Anatoly Schemelinin , Jim Li , Qibiao Chen , Charles Nenghe Wang
- 申请人： Greg Kirk , Rich Solarz , Chris Kirk , Gil Delgado , Anatoly Schemelinin , Jim Li , Qibiao Chen , Charles Nenghe Wang
- 申请人地址： US CA Milpitas
- 专利权人： KLA-Tencor Technologies Corp.
- 当前专利权人： KLA-Tencor Technologies Corp.
- 当前专利权人地址： US CA Milpitas
- 代理商 Ann Marie Mewherter
- 主分类号： G21G4/00
- IPC分类号： G21G4/00
摘要：
Methods and systems for providing illumination of a specimen for a process performed on the specimen are provided. One system configured to provide illumination of a specimen for a process performed on the specimen includes a laser configured to generate excitation light. The system also includes focusing optics configured to focus the excitation light to a plasma in an electrodeless lamp such that the plasma generates light. The system is also configured such that the light illuminates the specimen during the process.
信息查询
