公开(公告)号：US08148900B1

公开(公告)日：2012-04-03

申请号：US11623981

申请日：2007-01-17

申请人： Greg Kirk ,  Rich Solarz

发明人： Greg Kirk ,  Rich Solarz

IPC分类号： H01J65/00

CPC分类号： H01J65/046 ,  G01N21/8806 ,  G01N21/9501

摘要： Methods and systems for providing illumination of a specimen for inspection are provided. One embodiment relates to a system configured to provide illumination of a specimen for inspection. The system includes an electrodeless lamp configured to generate light. The system is further configured such that the light illuminates the specimen during the inspection. Another embodiment relates to a system configured to inspect a specimen. The system includes an electrodeless lamp configured to generate light and one or more optical elements configured to direct the light to the specimen. The system also includes a detection subsystem configured to generate output responsive to light from the specimen. The output can be used to detect defects on the specimen. An additional embodiment relates to a method for providing illumination of a specimen for inspection. The method includes illuminating the specimen during the inspection with light generated by an electrodeless lamp.

摘要翻译： 提供了用于提供用于检查的样本的照明的方法和系统。 一个实施例涉及一种被配置为提供用于检查的样本的照明的系统。 该系统包括配置成产生光的无电极灯。 该系统进一步配置成使得在检查期间光照射样品。 另一实施例涉及一种被配置为检查样本的系统。 该系统包括被配置为产生光的无电极灯和被配置为将光引导到样本的一个或多个光学元件。 该系统还包括检测子系统，被配置为产生响应于来自样本的光的输出。 输出可用于检测样品上的缺陷。 另外的实施例涉及一种用于提供用于检查的样本的照明的方法。 该方法包括在检查期间用无电极灯产生的光照射样品。

公开(公告)号：US07705331B1

公开(公告)日：2010-04-27

申请号：US11771430

申请日：2007-06-29

申请人： Greg Kirk ,  Rich Solarz ,  Chris Kirk ,  Gil Delgado ,  Anatoly Schemelinin ,  Jim Li ,  Qibiao Chen ,  Charles Nenghe Wang

发明人： Greg Kirk ,  Rich Solarz ,  Chris Kirk ,  Gil Delgado ,  Anatoly Schemelinin ,  Jim Li ,  Qibiao Chen ,  Charles Nenghe Wang

IPC分类号： G21G4/00

CPC分类号： G03F7/70616 ,  G01N21/8806 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/8825 ,  G01N2201/061 ,  G03F7/70033 ,  G03F7/70575 ,  H01J65/04

摘要： Methods and systems for providing illumination of a specimen for a process performed on the specimen are provided. One system configured to provide illumination of a specimen for a process performed on the specimen includes a laser configured to generate excitation light. The system also includes focusing optics configured to focus the excitation light to a plasma in an electrodeless lamp such that the plasma generates light. The system is also configured such that the light illuminates the specimen during the process.

摘要翻译： 提供了用于提供用于对样本进行的处理的样本的照明的方法和系统。 被配置为提供对于在样本上执行的处理的样本的照明的一个系统包括被配置为产生激发光的激光器。 该系统还包括配置成将激发光聚焦到无电极灯中的等离子体的聚焦光学元件，使得等离子体产生光。 该系统还被配置为使得该光在该过程期间照射样本。

公开(公告)号：US07535563B1

公开(公告)日：2009-05-19

申请号：US11464567

申请日：2006-08-15

申请人： Grace Hsiu-Ling Chen ,  Tao-Yi Fu ,  Jamie Sullivan ,  Shing Lee ,  Greg Kirk

发明人： Grace Hsiu-Ling Chen ,  Tao-Yi Fu ,  Jamie Sullivan ,  Shing Lee ,  Greg Kirk

IPC分类号： G01N21/00

CPC分类号： G01N21/4788 ,  G01N21/9501 ,  G01N21/95623 ,  G02B26/0841

摘要： Systems configured to inspect a specimen are provided. One system includes an illumination subsystem configured to illuminate a two-dimensional field of view on the specimen. The system also includes a collection subsystem configured to collect light scattered from the specimen. In addition, the system includes an array of micro-mirrors configured to reflect a two-dimensional pattern of light diffracted from periodic structures on the specimen out of the optical path of the system without reflecting light across an entire dimension of the array out of the optical path. The system further includes a detection subsystem configured to generate output responsive to light reflected by the array into the optical path. The output can be used to detect defects on the specimen. In one embodiment, the system includes an optical element configured to increase the uniformity of the wavefront of the light reflected by the array into the optical path.

摘要翻译： 提供了配置为检查样本的系统。 一个系统包括被配置为照亮样本上的二维视场的照明子系统。 该系统还包括收集子系统，其被配置为收集从样本散射的光。 另外，该系统包括微镜阵列，微阵列阵列被配置成将来自系统的光路上的样品上的周期性结构衍射的光的二维图案反射出来，而不会反射穿过该阵列的整个尺寸的光 光路。 该系统还包括检测子系统，该检测子系统被配置为响应于由阵列反射到光路中的光产生输出。 输出可用于检测样品上的缺陷。 在一个实施例中，该系统包括被配置为增加由阵列反射到光路中的光的波前的均匀性的光学元件。