发明授权
- 专利标题: Processing apparatus and lid opening/closing mechanism
- 专利标题(中): 处理装置和盖打开/关闭机构
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申请号: US11684717申请日: 2007-03-12
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公开(公告)号: US07707965B2公开(公告)日: 2010-05-04
- 发明人: Jun Yamashita
- 申请人: Jun Yamashita
- 申请人地址: JP Tokyo
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2006-067733 20060313
- 主分类号: C23C16/00
- IPC分类号: C23C16/00 ; C23F1/00 ; H01L21/306
摘要:
A processing apparatus includes an openable/closable lid disposed on a process container, and an opening/closing mechanism configured to open/close the lid. The opening/closing mechanism includes a hinge structure swingably coupling the lid to one end of the process container, and a drive structure configured to swing the lid. The hinge structure includes a main shaft used as a rotation axis when the lid is swung by the drive structure, and an adjusting shaft located on a distal end side relative to the main shaft, for adjusting an angle of the lid.
公开/授权文献
- US20070238307A1 PROCESSING APPARATUS AND LID OPENING/CLOSING MECHANISM 公开/授权日:2007-10-11
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