发明授权
- 专利标题: Semiconductor device and method of manufacture thereof
- 专利标题(中): 半导体装置及其制造方法
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申请号: US11551042申请日: 2006-10-19
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公开(公告)号: US07714413B2公开(公告)日: 2010-05-11
- 发明人: Noboru Morimoto , Masahiko Fujisawa , Daisuke Kodama
- 申请人: Noboru Morimoto , Masahiko Fujisawa , Daisuke Kodama
- 申请人地址: JP Tokyo
- 专利权人: Renesas Technology Corp.
- 当前专利权人: Renesas Technology Corp.
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2005-309745 20051025
- 主分类号: H01L23/544
- IPC分类号: H01L23/544
摘要:
A seal ring is provided between a region where a circuit is formed on a semiconductor substrate and a dicing region. The seal ring has a portion where sealing layers of which the cross sectional form is in T-shape are layered and a portion where sealing layers of which the cross sectional form is rectangular are layered.
公开/授权文献
- US20070090447A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE THEREOF 公开/授权日:2007-04-26
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