- 专利标题: Fin field effect transistor and method of manufacturing the same
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申请号: US12230571申请日: 2008-09-02
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公开(公告)号: US07723797B2公开(公告)日: 2010-05-25
- 发明人: Sung-Min Kim , Min-Sang Kim , Ji-Myoung Lee , Dong-Won Kim
- 申请人: Sung-Min Kim , Min-Sang Kim , Ji-Myoung Lee , Dong-Won Kim
- 申请人地址: KR Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd..
- 当前专利权人: Samsung Electronics Co., Ltd..
- 当前专利权人地址: KR Gyeonggi-do
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: KR10-2007-0088162 20070831
- 主分类号: H01L29/76
- IPC分类号: H01L29/76 ; H01L29/94 ; H01L31/062 ; H01L31/113 ; H01L31/119
摘要:
Provided are a FinFET and a method of manufacturing the same. A FinFET may include at least one active fin, at least one gate insulating layer pattern, a first electrode pattern, a second electrode pattern and at least one pair of source/drain expansion regions. The at least one active fin may be formed on a substrate. The at least one gate insulating layer pattern may be formed on the at least one active fin. The first electrode pattern may be formed on the at least one gate insulating layer pattern. Further, the first electrode pattern may be intersected with the at least one active fin. The second electrode pattern may be formed on the first electrode pattern. Further, the second electrode pattern may have a width greater than that of the first electrode pattern. The at least one pair of source/drain expansion regions may be formed on a surface of the at least one active fin on both sides of the first electrode pattern. Thus, the FinFET may have improved capacity and reduced GIDL current.
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