发明授权
- 专利标题: Integration scheme for multiple metal gate work function structures
- 专利标题(中): 多金属门功能结构的集成方案
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申请号: US11924053申请日: 2007-10-25
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公开(公告)号: US07732872B2公开(公告)日: 2010-06-08
- 发明人: Kangguo Cheng , Michael P. Chudzik , Ramachandra Divakaruni , Geng Wang , Robert C. Wong , Haining S. Yang
- 申请人: Kangguo Cheng , Michael P. Chudzik , Ramachandra Divakaruni , Geng Wang , Robert C. Wong , Haining S. Yang
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 代理商 H. Daniel Schnurmann
- 主分类号: H01L27/088
- IPC分类号: H01L27/088
摘要:
A metal gate stack containing a metal layer having a mid-band-gap work function is formed on a high-k gate dielectric layer. A threshold voltage adjustment oxide layer is formed over a portion of the high-k gate dielectric layer to provide devices having a work function near a first band gap edge, while another portion of the high-k dielectric layer remains free of the threshold voltage adjustment oxide layer. A gate stack containing a semiconductor oxide based gate dielectric and a doped polycrystalline semiconductor material may also be formed to provide a gate stack having a yet another work function located near a second band gap edge which is the opposite of the first band gap edge. A dense circuit containing transistors of p-type and n-type with the mid-band-gap work function are formed in the region containing the threshold voltage adjustment oxide layer.
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