发明授权
US07749930B2 Holder made from quartz glass for the processing of semiconductor wafers and method for production of the holder
有权
由石英玻璃制成的用于加工半导体晶片的支架和用于制造支架的方法
- 专利标题: Holder made from quartz glass for the processing of semiconductor wafers and method for production of the holder
- 专利标题(中): 由石英玻璃制成的用于加工半导体晶片的支架和用于制造支架的方法
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申请号: US11630405申请日: 2006-03-30
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公开(公告)号: US07749930B2公开(公告)日: 2010-07-06
- 发明人: Juergen Weber , Tobias Pogge , Martin Trommer , Bodo Kuehn , Ulrich Kirst , Waltraud Werdecker
- 申请人: Juergen Weber , Tobias Pogge , Martin Trommer , Bodo Kuehn , Ulrich Kirst , Waltraud Werdecker
- 申请人地址: DE Hanau
- 专利权人: Heraeus Quarzglas GmbH & Co. KG
- 当前专利权人: Heraeus Quarzglas GmbH & Co. KG
- 当前专利权人地址: DE Hanau
- 代理机构: Taijoloff and Kelly LLP
- 优先权: DE102005017739 20050415
- 国际申请: PCT/EP2006/061192 WO 20060330
- 国际公布: WO2006/108766 WO 20061019
- 主分类号: C03C3/06
- IPC分类号: C03C3/06 ; C03C3/04 ; C03C15/00 ; C03B19/00 ; C03B21/00 ; C03B32/00 ; C03B25/00
摘要:
An ideal quartz glass for a wafer jig for use in an environment having an etching effect is distinguished by both high purity and high resistance to dry etching. To indicate a quartz glass that substantially fulfills these requirements, it is suggested according to the invention that the quartz glass is doped with nitrogen at least in a near-surface area, has a mean content of metastable hydroxyl groups of less than 30 wt ppm and that its fictive temperature is below 1250° C. and its viscosity is at least 1013 dPa·s at a temperature of 1200° C. An economic method for producing such a quartz glass comprises the following method steps: melting an SiO2 raw material to obtain a quartz glass blank, the SiO2 raw material or the quartz glass blank being subjected to a dehydration measure, heating the SiO2 raw material or the quartz glass blank to a nitriding temperature in the range between 1050° C. and 1850° C. in an ammonia-containing atmosphere, a temperature treatment by means of which the quartz glass of the quartz glass blank is set to a fictive temperature of 1250° C. or less, and a surface treatment of the quartz glass blank with formation of the quartz glass jig.
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