Invention Grant
US07750295B2 Extractor for an microcolumn, an alignment method for an extractor aperture to an electron emitter, and a measuring method and an alignment method using thereof
有权
用于微柱的提取器，用于提取器孔到电子发射器的对准方法，以及使用其的测量方法和对准方法
- Patent Title: Extractor for an microcolumn, an alignment method for an extractor aperture to an electron emitter, and a measuring method and an alignment method using thereof
- Patent Title (中): 用于微柱的提取器，用于提取器孔到电子发射器的对准方法，以及使用其的测量方法和对准方法
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Application No.: US10538284Application Date: 2003-12-30
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Publication No.: US07750295B2Publication Date: 2010-07-06
- Inventor: Ho Soeb Kim , Seung Joon Ahn , Dae Wook Kim
- Applicant: Ho Soeb Kim , Seung Joon Ahn , Dae Wook Kim
- Applicant Address: KR Chungcheongnam-do
- Assignee: Cebt Co., Ltd.
- Current Assignee: Cebt Co., Ltd.
- Current Assignee Address: KR Chungcheongnam-do
- Agency: Bacon & Thomas, PLLC
- Priority: KR10-2002-0087224 20021230; KR10-2002-0087226 20021230
- International Application: PCT/KR03/02900 WO 20031230
- International Announcement: WO2004/059690 WO 20040715
- Main IPC: H01J37/352
- IPC: H01J37/352
Abstract:
The present invention provides a new extractor for a micro-column and an alignment method of the aperture of the extractor and an electron emitter for a micro-column. Further, the present invention provides a measuring system, a method for measuring, and an alignment method using the principle of the alignment.
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