发明授权
- 专利标题: Ion implanter and method for implanting a wafer
- 专利标题(中): 离子注入机和植入晶片的方法
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申请号: US12465189申请日: 2009-05-13
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公开(公告)号: US07750323B1公开(公告)日: 2010-07-06
- 发明人: Zhimin Wan , Cheng-Hui Shen , Ko-Chuan Jen
- 申请人: Zhimin Wan , Cheng-Hui Shen , Ko-Chuan Jen
- 申请人地址: TW Hsinchu
- 专利权人: Advanced Ion Beam Technology, Inc.
- 当前专利权人: Advanced Ion Beam Technology, Inc.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Rosenberg, Klein & Lee
- 主分类号: H01J37/317
- IPC分类号: H01J37/317 ; H01J37/08 ; H01L21/265
摘要:
An ion implanter and a method for implanting a wafer are provided, wherein the method includes the following steps. First, a wafer has at least a first portion requiring a first doping density and a second portion requiring a second doping density is provided. The first doping density is larger than the second doping density. Thereafter, the first portion is scanned by an ion beam with a first scanning parameter value, and the second portion is scanned by the ion beam with a second scanning parameter value. The first scanning parameter value can be a first scan velocity, and the second scanning parameter value can be a second scan velocity different than the first scan velocity. Alternatively, the first scanning parameter value can be a first beam current, and the second scanning parameter value can be a second beam current different than the first beam current.
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