发明授权
- 专利标题： Tunable microcantilever infrared sensor
- 专利标题（中）： 可调谐微型悬臂梁红外传感器
-
申请号： US11688745申请日： 2007-03-20
-
公开(公告)号： US07755049B2公开(公告)日： 2010-07-13
- 发明人: Gregory Simelgor , Scott R. Hunter , Shankar Radhakrishnan
- 申请人： Gregory Simelgor , Scott R. Hunter , Shankar Radhakrishnan
- 申请人地址： US MA Woburn
- 专利权人： Agiltron, Inc.
- 当前专利权人： Agiltron, Inc.
- 当前专利权人地址： US MA Woburn
- 代理机构： Burns & Levinson LLP
- 代理商 Jacob N. Erlich; Orlando Lopez
- 主分类号： G01J5/02
- IPC分类号： G01J5/02
摘要：
An electromagnetic radiation sensor that exhibits improved performance by virtue of an ability to tune its sensitivity is disclosed. The electromagnetic radiation sensor incorporates thermal actuators that act in opposition to one another, but which have a slight difference in responsivity. A temperature controller is used to tune the sensitivity of the electromagnetic radiation sensor by controlling the temperature of the substrate on which the sensor is formed.
公开/授权文献
- US20080230698A1 Tunable Microcantilever Infrared Sensor 公开/授权日：2008-09-25
信息查询
