Abstract:
An electromagnetic radiation sensor that exhibits improved performance by virtue of an ability to tune its sensitivity is disclosed. The electromagnetic radiation sensor incorporates thermal actuators that act in opposition to one another, but which have a slight difference in responsivity. A temperature controller is used to tune the sensitivity of the electromagnetic radiation sensor by controlling the temperature of the substrate on which the sensor is formed.
Abstract:
A radiation sensor array that exhibits improved fill factor is disclosed. The radiation sensor array incorporates sensors having support arms that are nested in vertical fashion with the support arms of neighboring sensors. This vertically-nested structure enables the radiation-sensing portions of the sensors to be more closely-packed.
Abstract:
A radiation sensor array that exhibits improved fill factor is disclosed. The radiation sensor array incorporates sensors having support arms that are nested in vertical fashion with the support arms of neighboring sensors. This vertically-nested structure enables the radiation-sensing portions of the sensors to be more closely-packed.
Abstract:
An electromagnetic radiation sensor that exhibits improved performance by virtue of an ability to tune its sensitivity is disclosed. The electromagnetic radiation sensor incorporates thermal actuators that act in opposition to one another, but which have a slight difference in responsivity. A temperature controller is used to tune the sensitivity of the electromagnetic radiation sensor by controlling the temperature of the substrate on which the sensor is formed.
Abstract:
A thermal bimorph that exhibits improved layer adhesion and an enhanced bending response is disclosed. The thermal bimorph incorporates corrugations that extend fully through the bimorph to its two major surfaces. In some embodiments, the thermal bimorph is asymmetrically corrugated.