Invention Grant
- Patent Title: Tunable microcantilever infrared sensor
- Patent Title (中): 可调谐微型悬臂梁红外传感器
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Application No.: US11688745Application Date: 2007-03-20
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Publication No.: US07755049B2Publication Date: 2010-07-13
- Inventor: Gregory Simelgor , Scott R. Hunter , Shankar Radhakrishnan
- Applicant: Gregory Simelgor , Scott R. Hunter , Shankar Radhakrishnan
- Applicant Address: US MA Woburn
- Assignee: Agiltron, Inc.
- Current Assignee: Agiltron, Inc.
- Current Assignee Address: US MA Woburn
- Agency: Burns & Levinson LLP
- Agent Jacob N. Erlich; Orlando Lopez
- Main IPC: G01J5/02
- IPC: G01J5/02
Abstract:
An electromagnetic radiation sensor that exhibits improved performance by virtue of an ability to tune its sensitivity is disclosed. The electromagnetic radiation sensor incorporates thermal actuators that act in opposition to one another, but which have a slight difference in responsivity. A temperature controller is used to tune the sensitivity of the electromagnetic radiation sensor by controlling the temperature of the substrate on which the sensor is formed.
Public/Granted literature
- US20080230698A1 Tunable Microcantilever Infrared Sensor Public/Granted day:2008-09-25
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