发明授权
- 专利标题： Piezoelectric element and shape of an elecrode thereof
- 专利标题（中）： 压电元件及其电极的形状
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申请号： US12241455申请日： 2008-09-30
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公开(公告)号： US07755253B2公开(公告)日： 2010-07-13
- 发明人: Takao Ohnishi , Hideki Shimizu , Katsuyuki Tsuneoka
- 申请人： Takao Ohnishi , Hideki Shimizu , Katsuyuki Tsuneoka
- 申请人地址： JP Nagoya-shi
- 专利权人： NGK Insulators, Ltd.
- 当前专利权人： NGK Insulators, Ltd.
- 当前专利权人地址： JP Nagoya-shi
- 代理机构： Burr & Brown
- 优先权： JP2006-119580 20060424
- 主分类号： H01L41/08
- IPC分类号： H01L41/08
摘要：
A piezoelectric/electrostrictive film element includes a substrate, a lower electrode, a piezoelectric/electrostrictive film, and an upper electrode. The substrate has a thin-walled diaphragm portion, and a thick portion formed around the thin-walled diaphragm portion. The lower electrode is formed on the substrate in such a manner as to extend over the thin-walled diaphragm portion and the thick portion. The piezoelectric/electrostrictive film is formed on the lower electrode. The upper electrode is provided on the piezoelectric/electrostrictive film in such a manner as to face the thin-walled diaphragm portion. The upper electrode includes an upper-electrode body portion and a connection portion. The upper-electrode body portion has a planar shape generally similar to the planar shape of the thin-walled diaphragm portion.
公开/授权文献
- US20090072667A1 PIEZOELECTRIC/ELECTROSTRICTIVE FILM ELEMENT 公开/授权日：2009-03-19