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公开(公告)号：US07755253B2
公开(公告)日：2010-07-13
申请号：US12241455
申请日：2008-09-30
IPC分类号： H01L41/08
CPC分类号： H01L41/0475 , G01N29/022 , G01N29/245 , G01P15/0922 , H01L41/0973 , H01L41/1132
摘要： A piezoelectric/electrostrictive film element includes a substrate, a lower electrode, a piezoelectric/electrostrictive film, and an upper electrode. The substrate has a thin-walled diaphragm portion, and a thick portion formed around the thin-walled diaphragm portion. The lower electrode is formed on the substrate in such a manner as to extend over the thin-walled diaphragm portion and the thick portion. The piezoelectric/electrostrictive film is formed on the lower electrode. The upper electrode is provided on the piezoelectric/electrostrictive film in such a manner as to face the thin-walled diaphragm portion. The upper electrode includes an upper-electrode body portion and a connection portion. The upper-electrode body portion has a planar shape generally similar to the planar shape of the thin-walled diaphragm portion.
摘要翻译： 压电/电致伸缩膜元件包括基板，下电极，压电/电致伸缩膜和上电极。 基板具有薄壁的隔膜部分和形成在薄壁隔膜部分周围的厚部分。 下电极以在薄壁隔膜部分和厚部分上方延伸的方式形成在基板上。 压电/电致伸缩膜形成在下电极上。 上电极以面对薄壁隔膜部分的方式设置在压电/电致伸缩膜上。 上电极包括上电极主体部分和连接部分。 上部电极体部具有与薄壁隔膜部的平面形状大致相似的平面形状。
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公开(公告)号：US20090072667A1
公开(公告)日：2009-03-19
申请号：US12241455
申请日：2008-09-30
IPC分类号： H01L41/047
CPC分类号： H01L41/0475 , G01N29/022 , G01N29/245 , G01P15/0922 , H01L41/0973 , H01L41/1132
摘要： A piezoelectric/electrostrictive film element 10 includes a substrate 11, a lower electrode 12, a piezoelectric/electrostrictive film 15, and an upper electrode 16. The substrate 11 has a thin-walled diaphragm portion 11a, and a thick portion 11b formed around the thin-walled diaphragm portion 11a. The lower electrode 12 is formed on the substrate 11 in such a manner as to extend over the thin-walled diaphragm portion 11a and the thick portion 11b. The piezoelectric/electrostrictive film 15 is formed on the lower electrode 12. The upper electrode 16 is provided on the piezoelectric/electrostrictive film 15 in such a manner as to face the thin-walled diaphragm portion 11a. The upper electrode 16 includes an upper-electrode body portion 16a and a connection portion 16b. The upper-electrode body portion 16a has a planar shape generally similar to the planar shape of the thin-walled diaphragm portion 11a.
摘要翻译： 压电/电致伸缩膜元件10包括基板11，下电极12，压电/电致伸缩膜15和上电极16.基板11具有薄壁隔膜部分11a和形成在其上的厚壁部分11b 薄壁隔膜部分11a。 下电极12形成在基板11上，以便在薄壁隔膜部分11a和厚部分11b上延伸。 压电/电致伸缩膜15形成在下电极12上。上电极16以与薄壁隔膜部分11a相对的方式设置在压电/电致伸缩膜15上。 上电极16包括上电极体部16a和连接部16b。 上部电极体部16a具有与薄壁隔膜部11a的平面形状大致相似的平面形状。
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公开(公告)号：US07510461B2
公开(公告)日：2009-03-31
申请号：US11563291
申请日：2006-11-27
IPC分类号： B24B1/00
CPC分类号： B24B7/162 , Y10S269/90 , Y10S451/914
摘要： A method for grinding a number of objects includes a series of steps from arranging the objects to be ground on a grinding jig (a master plate) through removing the ground objects from the grinding jig after completion of the grinding process, smoothly and precisely without damaging a number of the objects to be ground and without altering the arrangement pattern of the objects to be ground from the start through the end of the series of steps.
摘要翻译： 一种用于研磨多个物体的方法包括一系列步骤，通过在研磨过程完成之后通过从研磨夹具中去除磨碎物体而将磨削物体布置在研磨夹具（主板）上，并且没有损坏 一些待研磨的物体，并且不改变从一系列步骤的开始到结束要研磨的物体的布置图案。
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公开(公告)号：US20070087666A1
公开(公告)日：2007-04-19
申请号：US11563291
申请日：2006-11-27
IPC分类号： B24B51/00
CPC分类号： B24B7/162 , Y10S269/90 , Y10S451/914
摘要： A method for grinding a number of objects includes a series of steps from arranging the objects to be ground on a grinding jig (a master plate) through removing the ground objects from the grinding jig after completion of the grinding process, smoothly and precisely without damaging a number of the objects to be ground and without altering the arrangement pattern of the objects to be ground from the start through the end of the series of steps.
摘要翻译： 一种用于研磨多个物体的方法包括一系列步骤，通过在研磨过程完成之后通过从研磨夹具中去除磨碎物体而将磨削物体布置在研磨夹具（主板）上，并且没有损坏 一些待研磨的物体，并且不改变从一系列步骤的开始到结束要研磨的物体的布置图案。
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公开(公告)号：US07169020B2
公开(公告)日：2007-01-30
申请号：US11264944
申请日：2005-11-02
IPC分类号： B24B49/00
CPC分类号： B24B7/162 , Y10S269/90 , Y10S451/914
摘要： A grinding jig set comprising a combination of several jig units and a method for grinding a number of objects are provided. The method comprises a series of steps from arranging the objects to be ground on a grinding jig (a master plate) through removing the ground objects from the grinding jig after completion of grinding process, smoothly and precisely without damaging a number of the objects to be ground and without altering the arrangement pattern of the objects to be ground from the start through the end of the series of steps. The jig set for grinding comprises a set of jig units used for a series of processing from allocation of objects to be ground on a grinding jig through removing the ground objects from the grinding jig after the grinding operation. The jig units include a small allocation tray, a dividing tray which can transfer the objects to be ground retained in the small allocation tray from a starting tray to the small allocation tray, a dividing plate which can arrange the objects to be ground laid on the small allocation tray onto the surface of a grinding jig in the transferred state, and a removing tray onto which the ground objects removed from the surface of the grinding jig by a specified removing process can be relocated in the transferred state and divided into partial patterns.
摘要翻译： 提供了包括多个夹具单元的组合的研磨夹具组和用于研磨多个物体的方法。 该方法包括一系列步骤，通过在研磨过程完成后从研磨夹具中去除磨碎物体，将研磨夹具（主板）上的待研磨物体布置成一系列步骤，平稳而精确地不损害若干物体 并且不改变从一开始到结束一系列步骤要研磨的物体的布置图案。 用于研磨的夹具组包括一组夹具单元，用于通过在研磨操作之后从研磨夹具中去除磨碎物体而在研磨夹具上分配要研磨的物体的一系列处理。 夹具单元包括小分配托盘，分割托盘，其可将待分配的托盘中保留的待磨碎物体从起始托盘传送到小分配托盘;分隔板，其可以将要被研磨的物体布置在 小分配托盘移动到转移状态的研磨夹具的表面上，并且通过特定的去除处理从研磨夹具的表面去除的地面物体的去除托盘可以以转印状态重新定位并分成部分图案。
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公开(公告)号：US20060099887A1
公开(公告)日：2006-05-11
申请号：US11264944
申请日：2005-11-02
IPC分类号： B24B51/00
CPC分类号： B24B7/162 , Y10S269/90 , Y10S451/914
摘要： A grinding jig set comprising a combination of several jig units and a method for grinding a number of objects are provided. The method comprises a series of steps from arranging the objects to be ground on a grinding jig (a master plate) through removing the ground objects from the grinding jig after completion of grinding process, smoothly and precisely without damaging a number of the objects to be ground and without altering the arrangement pattern of the objects to be ground from the start through the end of the series of steps. The jig set for grinding comprises a set of jig units used for a series of processing from allocation of objects to be ground on a grinding jig through removing the ground objects from the grinding jig after the grinding operation. The jig units include a small allocation tray, a dividing tray which can transfer the objects to be ground retained in the small allocation tray from a starting tray to the small allocation tray, a dividing plate which can arrange the objects to be ground laid on the small allocation tray onto the surface of a grinding jig in the transferred state, and a removing tray onto which the ground objects removed from the surface of the grinding jig by a specified removing process can be relocated in the transferred state and divided into partial patterns.
摘要翻译： 提供了包括多个夹具单元的组合的研磨夹具组和用于研磨多个物体的方法。 该方法包括一系列步骤，通过在研磨过程完成后从研磨夹具中去除磨碎物体，将研磨夹具（主板）上的待研磨物体布置成一系列步骤，平稳而精确地不损害若干物体 并且不改变从一开始到结束一系列步骤要研磨的物体的布置图案。 用于研磨的夹具组包括一组夹具单元，用于通过在研磨操作之后从研磨夹具中去除磨碎物体而在研磨夹具上分配要研磨的物体的一系列处理。 夹具单元包括小分配托盘，分割托盘，其可将待分配的托盘中保留的待磨碎物体从起始托盘传送到小分配托盘;分隔板，其可以将要被研磨的物体布置在 小分配托盘移动到转移状态的研磨夹具的表面上，并且通过特定的去除处理从研磨夹具的表面去除的地面物体的去除托盘可以以转印状态重新定位并分成部分图案。
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