发明授权
- 专利标题: Exposure apparatus
- 专利标题(中): 曝光装置
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申请号: US12024332申请日: 2008-02-01
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公开(公告)号: US07755740B2公开(公告)日: 2010-07-13
- 发明人: Izumi Tsukamoto , Hideki Nogawa
- 申请人: Izumi Tsukamoto , Hideki Nogawa
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Canon U.S.A., Inc. I.P. Division
- 优先权: JP2007-027463 20070207; JP2007-334573 20071226
- 主分类号: G03B27/42
- IPC分类号: G03B27/42 ; G03B27/52
摘要:
An exposure apparatus exposing a plurality of shot areas on a substrate to light through a liquid includes a movable stage including a chuck configured to hold the substrate and a plate arranged around of the chuck, a projection optical system configured to project a light through an original onto the substrate held by the chuck, a first liquid supply nozzle arranged along a periphery of a final optical element of the projection optical system, and a plurality of second liquid supply nozzles arranged on the stage. The exposure apparatus supplies the liquid to a gap between the final optical element and the substrate through the first liquid supply nozzle. The exposure apparatus selects a nozzle for supplying the liquid from among the plurality of the second liquid supply nozzles based on a location of an exposure shot area on the substrate.
公开/授权文献
- US20080187872A1 EXPOSURE APPARATUS 公开/授权日:2008-08-07
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