发明授权
- 专利标题： Method for repairing a microelectromechanical system
- 专利标题（中）： 修复微机电系统的方法
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申请号： US11778207申请日： 2007-07-16
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公开(公告)号： US07761966B2公开(公告)日： 2010-07-27
- 发明人: Lakshmikanth Namburi , Raffi Garabedian
- 申请人： Lakshmikanth Namburi , Raffi Garabedian
- 申请人地址： US CA Baldwin Park
- 专利权人： Touchdown Technologies, Inc.
- 当前专利权人： Touchdown Technologies, Inc.
- 当前专利权人地址： US CA Baldwin Park
- 代理商 Manuel F. de la Cerra
- 主分类号： B23P19/04
- IPC分类号： B23P19/04
摘要：
A method for repairing a damaged probe from a probe card comprising the steps of removing the damaged probe from the probe card, separating one a plurality of replacement probes from a substrate and installing the one probe separated from the plurality of replacement probes where the damaged probe was removed.
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