发明授权
- 专利标题: Semiconductor memory having ferroelectric capacitor
- 专利标题(中): 具有铁电电容器的半导体存储器
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申请号: US11898297申请日: 2007-09-11
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公开(公告)号: US07763920B2公开(公告)日: 2010-07-27
- 发明人: Yoshinori Kumura , Tohru Ozaki , Iwao Kunishima
- 申请人: Yoshinori Kumura , Tohru Ozaki , Iwao Kunishima
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- 优先权: JPP2006-248459 20060913
- 主分类号: H01L27/108
- IPC分类号: H01L27/108 ; H01L29/76 ; H01L29/94 ; H01L31/119 ; H01L31/062 ; H01L31/113
摘要:
According to an aspect of the present invention, there is provided a semiconductor memory including a lower electrode, a first insulating region formed in the same layer as the lower electrode, a ferroelectric film formed on the lower electrode and on the first insulating region, an upper electrode formed on the ferroelectric film, a second insulating region formed in the same layer as the upper electrode and a transistor. The first insulating region partitions the lower electrode. The second insulating region partitions the upper electrode. The transistor includes a first impurity region connected to the lower electrode and a second impurity region connected to the upper electrode. At least one of the first insulating region and the second insulating region is formed by insulating the lower electrode or the upper electrode.
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