Invention Grant
US07767028B2 Cleaning hardware kit for composite showerhead electrode assemblies for plasma processing apparatuses
有权
用于等离子体处理设备的复合喷头电极组件的清洁硬件套件
- Patent Title: Cleaning hardware kit for composite showerhead electrode assemblies for plasma processing apparatuses
- Patent Title (中): 用于等离子体处理设备的复合喷头电极组件的清洁硬件套件
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Application No.: US12073651Application Date: 2008-03-07
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Publication No.: US07767028B2Publication Date: 2010-08-03
- Inventor: Jason Augustino , Charles Rising
- Applicant: Jason Augustino , Charles Rising
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Buchanan Ingersoll & Rooney PC
- Main IPC: B08B7/00
- IPC: B08B7/00 ; B08B7/04 ; B08B3/04 ; B08B9/023 ; B08B9/027

Abstract:
Apparatus to clean silicon electrode assembly surfaces which controls or eliminates possible chemical attack of electrode assembly bonding materials, and eliminates direct handling contact with the parts to be cleaned during acid treatment, spray rinse, blow dry, bake and bagging. Aspects of the apparatus include a kit including an electrode carrier to hold an electrode assembly, a treatment stand to allow access to the electrode assembly, a spider plate to clamp the electrode assembly in the electrode carrier, a nitrogen purge plate to supply nitrogen gas to the backside of the electrode assembly during acid cleaning of the electrode, a water rinse plate to supply water to the electrode face, a blow dry plate to supply nitrogen to dry the electrode assembly and a bake stand to support the electrode assembly during a bake before placing the clean electrode assembly in a bag.
Public/Granted literature
- US20080223401A1 Cleaning hardware kit for composite showerhead electrode assemblies for plasma processing apparatuses Public/Granted day:2008-09-18
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