Invention Grant
US07767028B2 Cleaning hardware kit for composite showerhead electrode assemblies for plasma processing apparatuses 有权
用于等离子体处理设备的复合喷头电极组件的清洁硬件套件

Cleaning hardware kit for composite showerhead electrode assemblies for plasma processing apparatuses
Abstract:
Apparatus to clean silicon electrode assembly surfaces which controls or eliminates possible chemical attack of electrode assembly bonding materials, and eliminates direct handling contact with the parts to be cleaned during acid treatment, spray rinse, blow dry, bake and bagging. Aspects of the apparatus include a kit including an electrode carrier to hold an electrode assembly, a treatment stand to allow access to the electrode assembly, a spider plate to clamp the electrode assembly in the electrode carrier, a nitrogen purge plate to supply nitrogen gas to the backside of the electrode assembly during acid cleaning of the electrode, a water rinse plate to supply water to the electrode face, a blow dry plate to supply nitrogen to dry the electrode assembly and a bake stand to support the electrode assembly during a bake before placing the clean electrode assembly in a bag.
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