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US07767103B2 Micro-fluid ejection assemblies 有权
微流体喷射组件

Micro-fluid ejection assemblies
Abstract:
A micro-fluid ejection assembly and method therefor. The micro-fluid ejection assembly includes a silicon substrate having a fluid supply slot therein. The fluid supply slot is formed by an etch process conducted on a substrate using, a first etch mask circumscribing the fluid supply slot, and a second etch mask applied over a functional layer on the substrate.
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