Invention Grant
- Patent Title: Non-destructive approach to ellipsometric monitoring of a film coating on the inner surface of a tube shaped sample
- Patent Title (中): 在管状样品的内表面上的薄膜涂层的椭圆测量的非破坏性方法
-
Application No.: US11897401Application Date: 2007-08-30
-
Publication No.: US07768660B1Publication Date: 2010-08-03
- Inventor: Gregory K. Pribil , John A. Woollam , Martin M. Liphardt , James D. Welch
- Applicant: Gregory K. Pribil , John A. Woollam , Martin M. Liphardt , James D. Welch
- Applicant Address: US NE Lincoln
- Assignee: J.A. Woollam Co., Inc.
- Current Assignee: J.A. Woollam Co., Inc.
- Current Assignee Address: US NE Lincoln
- Agent James D. Welch
- Main IPC: G01J4/00
- IPC: G01J4/00
Abstract:
Disclosed is the use of a focused electromagnetic beam which is caused to impinge on the top surface of a tube shaped sample, to investigate a film coating on its inner surface during fabrication thereof and/or thereafter.
Information query
