发明授权
US07768699B2 Laser phase difference detecting device and laser phase control device
有权
激光相位差检测装置及激光相位控制装置
- 专利标题: Laser phase difference detecting device and laser phase control device
- 专利标题(中): 激光相位差检测装置及激光相位控制装置
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申请号: US11658315申请日: 2004-08-20
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公开(公告)号: US07768699B2公开(公告)日: 2010-08-03
- 发明人: Jiro Suzuki , Yoshihito Hirano , Yutaka Ezaki , Yasushi Horiuchi , Masaki Tabata , Kouji Namura , Izumi Mikami
- 申请人: Jiro Suzuki , Yoshihito Hirano , Yutaka Ezaki , Yasushi Horiuchi , Masaki Tabata , Kouji Namura , Izumi Mikami
- 申请人地址: JP Tokyo
- 专利权人: Mitsubishi Electric Corporation
- 当前专利权人: Mitsubishi Electric Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP.
- 国际申请: PCT/JP2004/012012 WO 20040820
- 国际公布: WO2006/018897 WO 20060223
- 主分类号: H01S3/00
- IPC分类号: H01S3/00 ; G02B5/28 ; G01B9/02
摘要:
A phase difference detecting device includes a splitter for splitting laser beams into a first group which will travel along a first path and a second group which will travel along a second path, a beam selection/extraction unit for selecting, as reference light, one beam from the first group to allow it to pass therethrough, a path length changing unit for changing the length of the first path, a combining unit for combining the reference light and beams which construct the second group to produce interference light, and a detector for detecting the intensity of the interference light. The device changes the length of the first path using the path length changing unit to detect a path length which maximizes the intensity of the interference light for each of the beams which construct the second group, and determines a phase difference among the beams from the detected path length.
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