Invention Grant
US07768814B2 Method and apparatus for measuring statistics of dram parameters with minimum perturbation to cell layout and environment 失效
用于以最小的细胞布局和环境扰动来测量播放参数统计的方法和装置

Method and apparatus for measuring statistics of dram parameters with minimum perturbation to cell layout and environment
Abstract:
The present invention provides a method for measuring statistics of dynamic random access memory (DRAM) process parameters for improving yield and performance of a DRAM. The basic principles for measuring capacitance are similar to charge based capacitance (CBCM), however the present invention differs in several fundamental aspects. In one embodiment, the method includes receiving a selection of a storage cell of the DRAM; measuring a storage cell capacitance (Ccell) of the storage cell; measuring a local bitline capacitance (Cbl) of the storage cell; measuring a transfer device voltage (VT) of the storage cell; computing a transfer ratio (TR) for the storage cell; and measuring a data retention time for the storage cell.
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