发明授权
- 专利标题: Resistive-type humidity sensing structure with microbridge and method therefor
- 专利标题(中): 具有微桥的电阻式湿度感测结构及其方法
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申请号: US11808660申请日: 2007-06-12
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公开(公告)号: US07770449B2公开(公告)日: 2010-08-10
- 发明人: Jung-Tai Chen , Chia-Yen Lee , Yii-Tay Chiou , Chun-Hsun Chu
- 申请人: Jung-Tai Chen , Chia-Yen Lee , Yii-Tay Chiou , Chun-Hsun Chu
- 申请人地址: TW Hsinchu
- 专利权人: Industrial Technology Research Institute
- 当前专利权人: Industrial Technology Research Institute
- 当前专利权人地址: TW Hsinchu
- 代理机构: Rabin & Berdo, P.C.
- 优先权: TW95138473A 20061018
- 主分类号: G01N27/12
- IPC分类号: G01N27/12
摘要:
A resistive-type humidity sensing structure with microbridge includes a substrate, a sensing portion, and two measuring electrodes. An isolated layer and a bridge are respectively formed on the substrate. The sensing portion includes a resistive and humidity sensing layer. Two measuring electrodes are formed on the resistive sensing layer corresponding to the bridge, so as to fix the sensing portion on the first isolated layer for measuring resistance values of the resistive sensing layer. The material of the humidity sensing layer changes its volume according to humidity, the length of the resistive sensing layer covered by the humidity sensing layer is warped, and the changes of the length of the material for the resistive sensing layer causes variations of the resistance value. Finally, two measuring electrodes are used to measure the humidity value.
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