公开(公告)号：US07770449B2

公开(公告)日：2010-08-10

申请号：US11808660

申请日：2007-06-12

申请人： Jung-Tai Chen ,  Chia-Yen Lee ,  Yii-Tay Chiou ,  Chun-Hsun Chu

发明人： Jung-Tai Chen ,  Chia-Yen Lee ,  Yii-Tay Chiou ,  Chun-Hsun Chu

IPC分类号： G01N27/12

CPC分类号： G01N27/048 ,  Y10T29/49101

摘要： A resistive-type humidity sensing structure with microbridge includes a substrate, a sensing portion, and two measuring electrodes. An isolated layer and a bridge are respectively formed on the substrate. The sensing portion includes a resistive and humidity sensing layer. Two measuring electrodes are formed on the resistive sensing layer corresponding to the bridge, so as to fix the sensing portion on the first isolated layer for measuring resistance values of the resistive sensing layer. The material of the humidity sensing layer changes its volume according to humidity, the length of the resistive sensing layer covered by the humidity sensing layer is warped, and the changes of the length of the material for the resistive sensing layer causes variations of the resistance value. Finally, two measuring electrodes are used to measure the humidity value.

摘要翻译： 具有微桥的电阻型湿度检测结构包括基板，感测部分和两个测量电极。 在基板上分别形成隔离层和桥。 感测部分包括电阻和湿度感测层。 在与电桥相对应的电阻感测层上形成两个测量电极，以将感测部分固定在第一隔离层上，以测量电阻感测层的电阻值。 湿度传感层的材料根据湿度改变其体积，由湿度感测层覆盖的电阻感测层的长度变形，并且电阻感测层的材料长度的变化导致电阻值的变化 。 最后，使用两个测量电极来测量湿度值。

公开(公告)号：US20070188974A1

公开(公告)日：2007-08-16

申请号：US11647216

申请日：2006-12-29

申请人： Jung-Tai Chen ,  Chia-Yen Lee ,  Yii-Tay Chiou ,  Chun-Hsun Chu

发明人： Jung-Tai Chen ,  Chia-Yen Lee ,  Yii-Tay Chiou ,  Chun-Hsun Chu

IPC分类号： H01G5/012

CPC分类号： H01G5/18 ,  H01C10/14 ,  Y10T29/49099

摘要： A humidity sensing structure having a cantilever resistor and a method for fabricating the same are disclosed. The method includes providing a substrate having a first surface and a second surface; performing an oxidation process on the first surface and the second surface to form a first oxide layer and a second oxide layer respectively; forming a resistance sensing layer on the first oxide layer; forming a humidity sensing layer on the resistance sensing layer; forming in the substrate a through-hole penetrating the first oxide layer and the second oxide layer; and forming a cantilever in the through-hole such that both the humidity sensing layer and the resistance sensing layer are secured in position on the cantilever. In response to humidity changes, the humidity sensing layer varies in volume and in consequence the resistance sensing layer varies in length, allowing ambient humidity to be measured.

摘要翻译： 公开了一种具有悬臂电阻的湿度检测结构及其制造方法。 该方法包括提供具有第一表面和第二表面的基底; 在所述第一表面和所述第二表面上进行氧化处理以分别形成第一氧化物层和第二氧化物层; 在所述第一氧化物层上形成电阻感测层; 在电阻感测层上形成湿度感测层; 在基板上形成穿透第一氧化物层和第二氧化物层的通孔; 并且在通孔中形成悬臂，使得湿度感测层和电阻感测层都固定在悬臂上的适当位置。 响应于湿度变化，湿度感测层的体积变化，因此电阻感测层的长度变化，允许测量环境湿度。

公开(公告)号：US07523643B2

公开(公告)日：2009-04-28

申请号：US11647216

申请日：2006-12-29

申请人： Jung-Tai Chen ,  Chia-Yen Lee ,  Yii-Tay Chiou ,  Chun-Hsun Chu

发明人： Jung-Tai Chen ,  Chia-Yen Lee ,  Yii-Tay Chiou ,  Chun-Hsun Chu

IPC分类号： G01N27/12 ,  G01N7/00 ,  G01N19/10 ,  H01C17/06

CPC分类号： H01G5/18 ,  H01C10/14 ,  Y10T29/49099

摘要： A humidity sensing structure having a cantilever resistor and a method for fabricating the same are disclosed. The method includes providing a substrate having a first surface and a second surface; performing an oxidation process on the first surface and the second surface to form a first oxide layer and a second oxide layer respectively; forming a resistance sensing layer on the first oxide layer; forming a humidity sensing layer on the resistance sensing layer; forming in the substrate a through-hole penetrating the first oxide layer and the second oxide layer; and forming a cantilever in the through-hole such that both the humidity sensing layer and the resistance sensing layer are secured in position on the cantilever. In response to humidity changes, the humidity sensing layer varies in volume and in consequence the resistance sensing layer varies in length, allowing ambient humidity to be measured.

摘要翻译： 公开了一种具有悬臂电阻的湿度检测结构及其制造方法。 该方法包括提供具有第一表面和第二表面的基底; 在所述第一表面和所述第二表面上进行氧化处理以分别形成第一氧化物层和第二氧化物层; 在所述第一氧化物层上形成电阻感测层; 在电阻感测层上形成湿度感测层; 在基板上形成穿透第一氧化物层和第二氧化物层的通孔; 并且在通孔中形成悬臂，使得湿度感测层和电阻感测层都固定在悬臂上的适当位置。 响应于湿度变化，湿度感测层的体积变化，因此电阻感测层的长度变化，允许测量环境湿度。

公开(公告)号：US20080092649A1

公开(公告)日：2008-04-24

申请号：US11808660

申请日：2007-06-12

申请人： Jung-Tai Chen ,  Chia-Yen Lee ,  Yii-Tay Chiou ,  Chun-Hsun Chu

发明人： Jung-Tai Chen ,  Chia-Yen Lee ,  Yii-Tay Chiou ,  Chun-Hsun Chu

IPC分类号： G01N27/12 ,  H01C17/00

CPC分类号： G01N27/048 ,  Y10T29/49101

摘要： A resistive-type humidity sensing structure with microbridge includes a substrate, a sensing portion, and two measuring electrodes. An isolated layer and a bridge are respectively formed on the substrate. The sensing portion includes a resistive and humidity sensing layer. Two measuring electrodes are formed on the resistive sensing layer corresponding to the bridge, so as to fix the sensing portion on the first isolated layer for measuring resistance values of the resistive sensing layer. The material of the humidity sensing layer changes its volume according to humidity, the length of the resistive sensing layer covered by the humidity sensing layer is warped, and the changes of the length of the material for the resistive sensing layer causes variations of the resistance value. Finally, two measuring electrodes are used to measure the humidity value.

摘要翻译： 具有微桥的电阻型湿度检测结构包括基板，感测部分和两个测量电极。 在基板上分别形成隔离层和桥。 感测部分包括电阻和湿度感测层。 在与电桥相对应的电阻感测层上形成两个测量电极，以将感测部分固定在第一隔离层上，以测量电阻感测层的电阻值。 湿度传感层的材料根据湿度改变其体积，由湿度感测层覆盖的电阻感测层的长度变形，并且电阻感测层的材料长度的变化导致电阻值的变化 。 最后，使用两个测量电极来测量湿度值。

公开(公告)号：US07409124B2

公开(公告)日：2008-08-05

申请号：US11105514

申请日：2005-04-14

申请人： Ming-Lang Tsai ,  Ming Jie Chou ,  Bor-Chen Tsai ,  Zong-Yuan Wu ,  Chih-Hsiang Ko ,  Chin-Sheng Chang ,  Yii-Tay Chiou ,  Chun-Hsun Chu ,  Jung-Tai Chen

发明人： Ming-Lang Tsai ,  Ming Jie Chou ,  Bor-Chen Tsai ,  Zong-Yuan Wu ,  Chih-Hsiang Ko ,  Chin-Sheng Chang ,  Yii-Tay Chiou ,  Chun-Hsun Chu ,  Jung-Tai Chen

IPC分类号： G02B6/30 ,  G02B6/36

CPC分类号： G02B6/4246

摘要： A fiber waveguide optical subassembly uses the multi-mode fiber to increase the alignment tolerance between the active optical element and the waveguide. The filter is thinner to lower the dispersion due to the optical coupling gap. The subassembly further combines the optical bench to achieve passive positioning. Therefore it reduces the cost and enhances the transmission rate.

摘要翻译： 光纤波导光学子组件使用多模光纤来增加有源光学元件与波导之间的对准公差。 由于光耦合间隙，滤光片较薄以降低色散。 该子组件进一步组合光学台以实现被动定位。 因此降低成本，提高传输速率。

公开(公告)号：US20070222008A1

公开(公告)日：2007-09-27

申请号：US11616766

申请日：2006-12-27

申请人： Jung-Tai Chen ,  Wen-Yang Chang ,  Yii-Tay Chiou ,  Chun-Hsun Chu

发明人： Jung-Tai Chen ,  Wen-Yang Chang ,  Yii-Tay Chiou ,  Chun-Hsun Chu

IPC分类号： H01L29/84 ,  H01L21/00

CPC分类号： B81C1/00896 ,  B81C2203/0154 ,  H01L2224/48091 ,  H01L2224/48247 ,  H01L2924/10155 ,  H01L2924/181 ,  H01L2924/1815 ,  H01L2924/00014 ,  H01L2924/00012

摘要： A plastic packaging of MEMS device and a method therefore are provided. The method includes the steps of: provide a carrier having a surface; provide at least one MEMS device having an active surface with a sensitive area and bonding pads thereon and a back surface; proceed a photoresist process to form a sacrificial layer on the sensitive area; bind and electrically connect the MEMS device to the surface of the carrier; form at least one molding compound, to which the upper surface of the sacrificial layer is exposed. Finally, decompose the sacrificial layer by a solvent to expose the MEMS device on the sensitive area, so as to let the sensitive area contact with ambient atmosphere.

摘要翻译： 提供了MEMS器件的塑料封装及其方法。 该方法包括以下步骤：提供具有表面的载体; 提供至少一个MEMS器件，其具有活性表面和敏感区域及其上的接合焊盘和背面; 进行光致抗蚀剂处理以在敏感区域上形成牺牲层; 将MEMS器件绑定并电连接到载体的表面; 形成至少一个模塑料，牺牲层的上表面暴露于该模塑料。 最后，通过溶剂分解牺牲层，使敏感区域上的MEMS器件暴露，使敏感区域与环境大气接触。

公开(公告)号：US20060110106A1

公开(公告)日：2006-05-25

申请号：US11105514

申请日：2005-04-14

申请人： Ming-Lang Tsai ,  Ming-Jie Chou ,  Bor-Chen Tsai ,  Zong-Yuan Wu ,  Chih-Hsiang Ko ,  Chin-Sheng Chang ,  Yii-Tay Chiou ,  Chun-Hsun Chu ,  Jung-Tai Chen

发明人： Ming-Lang Tsai ,  Ming-Jie Chou ,  Bor-Chen Tsai ,  Zong-Yuan Wu ,  Chih-Hsiang Ko ,  Chin-Sheng Chang ,  Yii-Tay Chiou ,  Chun-Hsun Chu ,  Jung-Tai Chen

IPC分类号： G02B6/36

CPC分类号： G02B6/4246

摘要： A fiber waveguide optical subassembly uses the multi-mode fiber to increase the alignment tolerance between the active optical element and the waveguide. The filter is thinner to lower the dispersion due to the optical coupling gap. The subassembly further combines the optical bench to achieve passive positioning. Therefore it reduces the cost and enhances the transmission rate.

摘要翻译： 光纤波导光学子组件使用多模光纤来增加有源光学元件与波导之间的对准公差。 由于光耦合间隙，滤光片较薄以降低色散。 该子组件进一步组合光学台以实现被动定位。 因此降低成本，提高传输速率。

公开(公告)号：US07198413B2

公开(公告)日：2007-04-03

申请号：US10915369

申请日：2004-08-11

申请人： Chih-Ting Kao ,  Chih-Hsiang Ko ,  Bor-Chen Tsai ,  Chun-Hsun Chu ,  Yii-Tay Chiou ,  Jung-Tai Chen

发明人： Chih-Ting Kao ,  Chih-Hsiang Ko ,  Bor-Chen Tsai ,  Chun-Hsun Chu ,  Yii-Tay Chiou ,  Jung-Tai Chen

IPC分类号： G02B6/36

CPC分类号： G02B6/4249 ,  G02B6/4214 ,  G02B6/4292

摘要： A parallel optical subassembly module structure comprises an opto-electronic device array, a base with a reflecting slope, and a micro-lens array plate with an inclined plane provided with a specific angle. The optical signal emitted from the opto-electronic device array reflects by the reflecting slope and is incident into the inclined plane of the micro-lens array plate with the specific angle. The inclined plane rectifies the optical signal to output in horizontal direction. Then the optical signal couples with the external fibers through each micro lens of the micro-lens array. The pathway of receiving the optical signal is the same as described above, but in reverse direction.

摘要翻译： 平行光学子组件模块结构包括光电子器件阵列，具有反射斜面的基底和具有设置有特定角度的倾斜平面的微透镜阵列板。 从光电子器件阵列发射的光信号由反射斜面反射并以特定角度入射到微透镜阵列板的倾斜平面中。 倾斜平面将光信号整流以在水平方向上输出。 然后，光信号通过微透镜阵列的每个微透镜与外部光纤耦合。 接收光信号的路径与上述相同，但是相反。

公开(公告)号：US20050185896A1

公开(公告)日：2005-08-25

申请号：US10915369

申请日：2004-08-11

申请人： Chih-Ting Kao ,  Chih-Hsiang Ko ,  Bor-Chen Tsai ,  Chun-Hsun Chu ,  Yii-Tay Chiou ,  Jung-Tai Chen

发明人： Chih-Ting Kao ,  Chih-Hsiang Ko ,  Bor-Chen Tsai ,  Chun-Hsun Chu ,  Yii-Tay Chiou ,  Jung-Tai Chen

IPC分类号： G02B6/00 ,  G02B6/36 ,  G02B6/42 ,  H04B10/00

CPC分类号： G02B6/4249 ,  G02B6/4214 ,  G02B6/4292

摘要： A parallel optical subassembly module structure comprises an opto-electronic device array, a base with a reflecting slope, and a micro-lens array plate with an inclined plane provided with a specific angle. The optical signal emitted from the opto-electronic device array reflects by the reflecting slope and is incident into the inclined plane of the micro-lens array plate with the specific angle. The inclined plane rectifies the optical signal to output in horizontal direction. Then the optical signal couples with the external fibers through each micro lens of the micro-lens array. The pathway of receiving the optical signal is the same as described above, but in reverse direction.

摘要翻译： 平行光学子组件模块结构包括光电子器件阵列，具有反射斜面的基底和具有设置有特定角度的倾斜平面的微透镜阵列板。 从光电子器件阵列发射的光信号由反射斜面反射并以特定角度入射到微透镜阵列板的倾斜平面中。 倾斜平面将光信号整流以在水平方向上输出。 然后，光信号通过微透镜阵列的每个微透镜与外部光纤耦合。 接收光信号的路径与上述相同，但是相反。

公开(公告)号：US07508519B2

公开(公告)日：2009-03-24

申请号：US11324481

申请日：2006-01-04

申请人： Ming-Lang Tsai ,  Jin-Sheng Chang ,  Yii-Tay Chiou ,  Chun-Hsun Chu

发明人： Ming-Lang Tsai ,  Jin-Sheng Chang ,  Yii-Tay Chiou ,  Chun-Hsun Chu

IPC分类号： G01N21/00

CPC分类号： G01N21/3504 ,  G01N21/274 ,  G01N2021/317 ,  G01N2201/08 ,  G01N2201/082 ,  G01N2201/0873

摘要： The apparatus for sensing plural gases is substantially a gas sensor adopting planar lightwave circuit for constructing reference optical path and sensing optical path, which is a flat structure with abilities of high accuracy, long-term stability, and short response time. The gas sensor can be widely applied for monitoring the safety of a working environment, securing the safety of workers, alerting potential hazard in a factory, inspecting harmful materials in a specific area, testing leakage of a pipeline, inspecting waste gas exhausted from automobile/motorcycle, and monitoring the living quality of household environment.

摘要翻译： 用于感测多种气体的装置基本上是采用平面光波电路的气体传感器，用于构建参考光路和感测光路，该光路是具有高精度，长期稳定性和响应时间短的能力的平坦结构。 气体传感器可广泛用于监测工作环境的安全性，确保工人的安全，警惕工厂的潜在危险，检查特定区域的有害物质，检测管道的泄漏，检查汽车/ 摩托车，并监测住户环境的生活质量。