发明授权
US07771151B2 Interface between conveyor and semiconductor process tool load port
有权
输送机和半导体加工工具加载口之间的接口
- 专利标题: Interface between conveyor and semiconductor process tool load port
- 专利标题(中): 输送机和半导体加工工具加载口之间的接口
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申请号: US11178072申请日: 2005-07-08
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公开(公告)号: US07771151B2公开(公告)日: 2010-08-10
- 发明人: Anthony C. Bonora , Michael Krolak , Roger G. Hine
- 申请人: Anthony C. Bonora , Michael Krolak , Roger G. Hine
- 申请人地址: JP Kyoto
- 专利权人: Muratec Automation Co., Ltd.
- 当前专利权人: Muratec Automation Co., Ltd.
- 当前专利权人地址: JP Kyoto
- 代理机构: Fish & Richardson P.C.
- 主分类号: H01L21/68
- IPC分类号: H01L21/68
摘要:
The present invention generally comprises a tool load device for transferring a container between a container transport system and a processing tool. The tool load device may service a single load port or multiple load ports. Regardless, the tool load device is preferably located between the load port of the processing tool and the section of the container transport system passing the processing tool. The tool load device provides an improved method of moving containers between a conventional load port and, for example, a conveyor. In another embodiment, the tool load device is coupled with an x-drive assembly that moves the tool load device along a path that is substantially parallel to the container transport system passing in front of the load port—allowing the tool load device to service multiple load ports.
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