发明授权
- 专利标题: Charge-trap nonvolatile memory devices
- 专利标题(中): 充电陷阱非易失性存储器件
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申请号: US11700315申请日: 2007-01-31
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公开(公告)号: US07772639B2公开(公告)日: 2010-08-10
- 发明人: Chang-Seok Kang , Jung-Dal Choi , Ju-Hyung Kim , Jong-Sun Sel , Jae-Sung Sim , Sang-Hun Jeon
- 申请人: Chang-Seok Kang , Jung-Dal Choi , Ju-Hyung Kim , Jong-Sun Sel , Jae-Sung Sim , Sang-Hun Jeon
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel Sibley & Sajovec
- 优先权: KR10-2006-0064518 20060710
- 主分类号: H01L29/788
- IPC分类号: H01L29/788
摘要:
Nonvolatile memory devices including device isolation patterns on a semiconductor substrate are provided. The device isolation patterns define a cell active region and a peripheral active region of the semiconductor substrate. Cell gate electrodes are provided that cross over the cell active regions. Memory cell patterns are provided between the cell gate electrodes and the cell active regions and extend toward the device isolation patterns. A tunnel insulation film is provided between the memory cell pattern and the cell active region. Related methods of fabricating nonvolatile memory devices are also provided herein.
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