发明授权
- 专利标题: Nanotube device structure and methods of fabrication
- 专利标题(中): 纳米管器件结构及其制造方法
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申请号: US12548131申请日: 2009-08-26
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公开(公告)号: US07777222B2公开(公告)日: 2010-08-17
- 发明人: Claude L. Bertin , Thomas Rueckes , Brent M. Segal
- 申请人: Claude L. Bertin , Thomas Rueckes , Brent M. Segal
- 申请人地址: US MA Woburn
- 专利权人: Nantero, Inc.
- 当前专利权人: Nantero, Inc.
- 当前专利权人地址: US MA Woburn
- 代理机构: Wilmer Cutler Pickering Hale and Dorr LLP
- 主分类号: H01L35/24
- IPC分类号: H01L35/24 ; H01L51/00 ; H01L41/00 ; H03H9/00
摘要:
Nanotube device structures and methods of fabrication. A method of making a nanotube switching element includes forming a first structure having at a first output electrode; forming second structure having a second output electrode; forming a conductive article having at least one nanotube, the article having first and second ends; positioning the conductive article between said first and second structures such that the first structure clamps the first and second ends of the article to the second structure, and such that the first and second output electrodes are opposite each other with the article positioned therebetween; providing at least one signal electrode in electrical communication with the conductive article; and providing at least one control electrode in spaced relation to the conductive article such that the control electrode may control the conductive article to form a conductive pathway between the signal electrode and the first output electrode.
公开/授权文献
- US20090315011A1 NANOTUBE DEVICE STRUCTURE AND METHODS OF FABRICATION 公开/授权日:2009-12-24
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