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US07780431B2 Nanoimprint molds and methods of forming the same 失效
纳米压印模具及其形成方法

Nanoimprint molds and methods of forming the same
摘要:
A nanoimprint mold includes a substrate having at least one substantially non-transferable feature and at least one transferable feature defined at different portions thereon. Methods for forming the same are also disclosed.
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