- 专利标题: Hermetic seal and reliable bonding structures for 3D applications
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申请号: US12038501申请日: 2008-02-27
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公开(公告)号: US07786596B2公开(公告)日: 2010-08-31
- 发明人: Kuan-Neng Chen , Bruce K. Furman , Edmund J. Sprogis , Anna W. Topol , Cornelia K. Tsang , Matthew R. Wordeman , Albert M. Young
- 申请人: Kuan-Neng Chen , Bruce K. Furman , Edmund J. Sprogis , Anna W. Topol , Cornelia K. Tsang , Matthew R. Wordeman , Albert M. Young
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 代理商 Richard Lau, Esq.
- 主分类号: H01L23/48
- IPC分类号: H01L23/48
摘要:
A sealed microelectronic structure which provides mechanical stress endurance and includes at least two chips being electrically connected to a semiconductor structure at a plurality of locations. Each chip includes a continuous bonding material along it's perimeter and at least one support column connected to each of the chips positioned within the perimeter of each chip. Each support column extends outwardly such that when the at least two chips are positioned over one another the support columns are in mating relation to each other. A seal between the at least two chips results from the overlapping relation of the chip to one another such that the bonding material and support columns are in mating relation to each other. Thus, the seal is formed when the at least two chips are mated together, and results in a bonded chip structure.
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