发明授权
- 专利标题: Electronic device and method for producing the same
- 专利标题(中): 电子装置及其制造方法
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申请号: US12274977申请日: 2008-11-20
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公开(公告)号: US07790539B2公开(公告)日: 2010-09-07
- 发明人: Ryuichiro Maruyama , Masafumi Ata , Masashi Shiraishi
- 申请人: Ryuichiro Maruyama , Masafumi Ata , Masashi Shiraishi
- 申请人地址: JP Tokyo
- 专利权人: Sony Corporation
- 当前专利权人: Sony Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Wolf, Greenfield & Sacks, P.C.
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A microelectronic device and a method for producing the device can overcome the disadvantages of known electronic devices composed of carbon molecules, and can deliver performance superior to the known devices. An insulated-gate field-effect transistor includes a multi-walled carbon nanotube (10) having an outer semiconductive carbon nanotube layer (1) and an inner metallic carbon nanotube layer (2) that is partially covered by the outer semiconductive carbon nanotube layer (1). A metal source electrode (3) and a metal drain electrode (5) are brought into contact with both ends of the semiconductive carbon nanotube layer (1) while a metal gate electrode (4) is brought into contact with the metallic carbon nanotube layer (2). The space between the semiconductive carbon nanotube layer (1) and the metallic carbon nanotube layer (2) is used as a gate insulating layer. Two layers including the outer semiconductive carbon nanotube layer (1) and the inner metallic carbon nanotube layer (2) are selected from carbon nanotube layers of a multi-walled carbon nanotube. These layers are processed into a form suitable for use as the multi-walled carbon nanotube (10).
公开/授权文献
- US20090075407A1 ELECTRONIC DEVICE AND METHOD FOR PRODUCING THE SAME 公开/授权日:2009-03-19
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